Dual damascene process for forming a multi-layer low-k dielectric interconnect

Abstract

In a dual damascene process for forming a multi-layer low-k dielectric interconnect, the formation of each layer of interconnect comprises deposition of a first low-k dielectric layer, etching of the first low-k dielectric layer to form two dual damascene vias, formation of two Cu conductor plugs enclosed with barrier layers in the two dual damascene vias, etching of the first low-k dielectric layer between the two dual damascene vias to form a trench, and spin-on of a second low-k dielectric layer filled in the trench. The spin-on low-k dielectric layer is selected to have a dielectric constant smaller than that of the first low-k dielectric layer to reduce the equivalent dielectric constant in the layer of interconnect.

Description

FIELD OF THE INVENTION [0001] The present invention relates generally to a dual damascene process and structure, and more particularly to a dual damascene process for forming a multi-layer low-k dielectric interconnect. BACKGROUND OF THE INVENTION [0002] Due to the rapid development of integrated circuit (IC) process, the components in an IC are shrunk to attain high density. For the high density and shrinkage, it is required more advanced wiring structure and new materials for better transmission performance. Thus, copper-based conductor is employed to replace the traditional aluminum wiring. High density of IC increases difficulties to the process and therefore, dual damascene process and structure is developed to simplify the fabrication work. [0003] In general, dual damascene process may reduce overall fabrication steps and copper-based conductor may effectively lower the resistance of wiring. However, in an extremely high density IC, formation of dual damascene interconnect wit...

AI Technical Summary

Benefits of technology

[0006] One object of the present invention is to propose a process of forming a multi-layer Cu dual damascene interconnect to lower the effective dielectric constant thereof and thereby reduce the speed delay of the IC employing the multi-layer Cu dual damascene interconnect.

Problems solved by technology

In general, dual damascene process may reduce overall fabrication steps and copper-based conductor may effectively lower the resistance of wiring.

However, in an extremely high density IC, formation of dual damascene interconnect with Cu process still faces high RC delay due to high dielectric constant of the inter-layer dielectric (ILD), and delay of the IC in operation arises.

Utilization of low-k material for ILD may lower the effective dielectric constant of dual damascene interconnect.

However, this method of lowering the dielectric constant has its limitation.

Even though further lowering the effective dielectric constant, this process complicates the process as well and likewise, much lower dielectric constant material may not be applied in this process.

Unfortunately, spin-on low-k dielectric having dielectric constant lower than 2.5 is difficult to apply to large area, uniform or thicker deposition and hence, is not suitable for current dual damascene process.

In the process, spin-on low-k dielectrics are difficult to control and are only suitable for trench filling.

In other words, conventional dual damascene processes cannot make good use of spin-on low-k dielectrics to lower the effective dielectric constant of dual damascene interconnects.

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