Method and apparatus for producing film roll, and film roll
a film roll and film technology, applied in the direction of thin material processing, instruments, optics, etc., can solve the problems of thin film or the like formed on the surface of the substrate, damage to the thin film or the like, and decline in display quality,
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embodiment 1
Preferred Embodiment 1
[0040]FIG. 1 through FIG. 3 show a method and an apparatus for producing a film roll of the present invention, and Preferred Embodiment 1 of the film roll. In the present preferred embodiment, a roll-to-roll wet etching apparatus is illustrated as an apparatus for producing a film roll.
[0041]FIG. 1 is a cross-sectional view of a wet etching apparatus 30a according to the present preferred embodiment.
[0042]The wet etching apparatus 30a includes a first roll housing chamber 21 where a film roll 3a before processing is housed, an etching process chamber 22 where etching is performed, a rinsing process chamber 23 where rinsing is performed, and a second roll housing chamber 24 where a film roll 3b after processing is housed, which are arranged in numerical sequence. The wall between the first roll housing chamber 21 and the etching process chamber 22, the wall between the etching process chamber 22 and the rinsing process chamber 23, and the wall between the rinsin...
embodiment 2
Preferred Embodiment 2
[0069]FIG. 5 shows Preferred Embodiment 2 of an apparatus for producing a film roll according to the present invention. The present preferred embodiment illustrates a coating apparatus using a roll-to-roll system as an apparatus for producing a film roll. Here, in each of the following preferred embodiments, the same elements as those of FIG. 1 through FIG. 3 are denoted by the same reference numerals used in FIG. 1 through FIG. 3, and the detailed descriptions thereof will be omitted.
[0070]FIG. 5 is a cross-sectional view of a coating apparatus 30b according to the present preferred embodiment.
[0071]The coating apparatus 30b includes a first roll housing chamber 21 where a film roll before processing is housed, a coating chamber 25 where coating is performed, a heating process chamber 26 where heating is performed, and a second roll housing chamber 24 where a film roll after processing is housed, which are arranged in numerical sequence. The wall between the f...
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Abstract
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