Undoped silicon heat spreader window

Abstract

A system and method for thermal management of a device under test (DUT). In particular, a system is described for performing optical microscopy. The system includes a heat spreader window that consists of substantially undoped silicon. The window is configured to be coupled to a back side of a substrate of a DUT such that thermal energy from the DUT is spread to the heat spreader window. A contact region is coupled to the heat spreader window. The contact region is configured for contact with a solid immersion lens (SIL) optical system for optical examination of the DUT. A heat exchanger is coupled to the heat spreader window for removing the thermal energy from the DUT during its operation, wherein the heat exchanger is configured to allow access to the heat spreader window.

Description

TECHNICAL FIELD[0001]Embodiments of the present invention relate to cooling of devices under test. More specifically, embodiments of the present invention are related to the thermal management of a device under test in systems that implement solid immersion lens optical systems for performing infrared microscopy.BACKGROUND ART[0002]The testing of digital circuits of a device under test (DUT) while under a functional system test requires cooling of the DUT during its operation. A DUT can consume up to 200 watts of power or more during its operation. As such, dissipation and removal of the thermal energy produced during testing is essential to adequately test the DUT under normal operating conditions.[0003]Thermal solutions currently exist for infrared optical sensor system that use air-coupled optics exclusively. For instance, diamond window heat spreaders can be used in conjunction with heat exchangers to provide optical access to a back side of a DUT during this operation while rem...

AI Technical Summary

Benefits of technology

Enables effective thermal management and minimizes optical aberrations, allowing for efficient infrared signal collection and optical examination of the device under test without introducing optical aberrations, thus enhancing the performance of solid immersion lens optical systems.

Problems solved by technology

However, diamond window heat spreader technology is not compatible with some forms of optical imaging systems.

For instance, the use of the diamond window heat spreader technology is not compatible with solid immersion lens (SIL) optical sensors.

Specifically, the use of the diamond window heat spreader introduces optical aberrations when using a SIL objective lens of an SIL optical system.

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