Scanning optical system, optical scanning device and radiographic image reading apparatus
a scanning optical system and scanning optical technology, applied in the direction of material analysis using wave/particle radiation, instruments, x/gamma/cosmic radiation measurement, etc., can solve the problem of increasing the size of the optical scanning device, difficult to use these scanning optical systems in combination with a galvanometer mirror, and difficulty in setting a sufficiently small beam diameter of not greater than 36 m on the surface to be scanned. , to achieve the effect of downsizing the optical scanning devi
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example 1
[0068]FIG. 1 shows a sectional view of the scanning optical system of Example 1. It should be noted that details of FIG. 1 are as explained above and the same explanation is not repeated in the following description unless otherwise necessary. The scanning optical system of Example 1 includes, in order from the light beam entrance side toward the surface to be scanned side, the mirror 4a of the galvanometer mirror 4, the positive first lens L1 which is a meniscus lens, the negative second lens L2 which is a biconcave lens, and the positive third lens L3 which is a meniscus lens.
[0069]Table 1 shows basic lens data of the scanning optical system of Example 1. In the following description, the mirror 4a side viewed from the elements disposed between the mirror 4a and the surface to be scanned 7 is referred to as “rear side” and the surface to be scanned 7 side is referred to as “front side”. In Table 1, each value in the column of “Si” represents the surface number of the i-th (i=1, 2,...
example 2
[0071]FIG. 2 shows a sectional view of a scanning optical system of Example 2. The scanning optical system of Example 2 includes, in order from the light beam entrance side toward the surface to be scanned side, the mirror 4a of the galvanometer mirror 4, the positive first lens L1 which is a meniscus lens, the negative second lens L2 which is a biconcave lens, and the positive third lens L3 which is a meniscus lens. Table 2 shows basic lens data of the scanning optical system of Example 2.
TABLE 2Example 2: Lens DataWavelength 660 nm, Deflection angle 40°(±20°), Aperture diameter Φ10 mmSiRiDiNdjνdj(Surface(Radius of(Surface(Refractive(Abbenumber)curvature)distance)index)number)119.0452−269.85947.5521.7282528.323−46.6341.9924−42.7925.0011.5168064.205312.44342.0576254.69423.5941.5168064.2073630.594510.761
example 3
[0072]FIG. 3 shows a sectional view of a scanning optical system of Example 3. The scanning optical system of Example 3 includes, in order from the light beam entrance side toward the surface to be scanned side, the mirror 4a of the galvanometer mirror 4, the positive first lens L1 which is a meniscus lens, the negative second lens L2 which is a biconcave lens, and the positive third lens L3 which is a biconvex lens. Table 3 shows basic lens data of the scanning optical system of Example 3.
TABLE 3Example 3: Lens DataWavelength 660 nm, Deflection angle 40°(±20°), Aperture diameter Φ10 mmSiRiDiNdjνdj(Surface(Radius of(Surface(Refractive(Abbenumber)curvature)distance)index)number)144.9862−198.96521.5141.7282528.323−51.1204.5194−47.4395.0001.5168064.205631.12737.3856302.96636.6521.5168064.207−695.289499.945
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