Lifting device and automatic handling system thereof

Abstract

The instant disclosure relates to a lifting device for transporting a wafer carrier to an automatic handling system including a suspension rail and an automatic guiding vehicle configured to move along the suspension rail, comprising an elevating holder, a plurality of suspension modules, and a plurality of first drive modules. Specially, the elevating holder has a motion sensor configured to detect whether the elevating holder is in a horizontal state or a non-horizontal state. The first drive modules can be used to synchronously drive the suspension modules according the horizontal state detected by the motion sensor, and the first drive modules can also be used to individually drive each of the suspension modules according the non-horizontal state detected by the motion sensor to recover the elevating holder from the non-horizontal state as the horizontal state.

Description

BACKGROUND OF THE INVENTION[0001]1. Field of the Invention[0002]The instant disclosure relates to a lifting device; in particular, to a lifting device for transporting wafer carriers of semiconductor wafer fab and an automatic handling system thereof.[0003]2. Description of Related Art[0004]With the continuous improvement of wafer process as well as considering economies of scale and cost efficiency, wafer surface area is increased from 300 mm to 450 mm. In the future, silicon wafers must be developed to have a larger surface area. Thus, operator cannot directly transport wafers so that wafer transportation must rely on an auto-transporting device or system. Accordingly, the working efficiency of the auto-transporting device or system will directly affect the throughput of semiconductor fab. Therefore, in order to meet the throughput requirement, the transporting device or system need to maintain high stability and high performance.[0005]Generally, semiconductor fab now utilizing an...

AI Technical Summary

Benefits of technology

[0008]The object of the instant disclosure is to provide a lifting device and an automatic handling system thereof. Said lifting device with auto-horizontal adjusting and positioning functions can prevent the automatic guiding vehicle from shutdown due to an irregular suspension or an alignment failure, thereby improving the overall efficiency of the automatic handling system.

Problems solved by technology

However, a swaying motion of the parts of the lifting device for grasping wafer carriers or an irregular suspension of the suspension elements of the lifting device may cause abnormal state of the AGV.

The reason is that there is an alignment requirement between the parts and a wafer carrier, and the irregular suspension of the suspension elements can cause alignment failure.

Moreover, if the suspension elements of the lifting device take a long time to elevate or lower wafer carriers, the parts of the lifting device cannot smoothly grasp a wafer carrier due to the non-horizontal state thereof caused by elastic fatigue of at least one of the suspension elements.

In consquence, the AGV can only stay at this time for trouble shooting such that overall transport time will be increased because of the traffic jam that other AGVs are blocked.

Although regular maintenance of the AGV can reduce the frequency of the abnormal events, but these condition may still affect the throughput of semiconductor fab.

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