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Actuator apparatus, electronic device, and control method

Inactive Publication Date: 2015-11-05
SEIKO EPSON CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Benefits of technology

The invention provides an actuator system, an electronic device, and a control method that can accurately control gaps using multiple electrostatic actuators. This results in more precise and controlled movements.

Problems solved by technology

In the Fabry-Perot etalon filter disclosed in JP-A-2003-215473, nevertheless, electrostatic capacitance for each of the electrostatic actuators is detected by the detector, and this configuration leads to a problem in that the detector is required to incorporate detection circuits each associated with a corresponding one of the electrostatic actuators.
In this configuration, unfortunately, interactions among the individual electrostatic actuators make it difficult to perform the feedback control.

Method used

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  • Actuator apparatus, electronic device, and control method
  • Actuator apparatus, electronic device, and control method
  • Actuator apparatus, electronic device, and control method

Examples

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Embodiment Construction

[0043]Hereinafter, an embodiment according to the invention will be described with reference to the drawings. Configuration of Spectroscopic Measurement Apparatus

[0044]FIG. 1 is a block diagram illustrating an outline configuration of a spectroscopic measurement apparatus according to a first embodiment of the invention.

[0045]A spectroscopic measurement apparatus 1 is an embodiment of an electronic device according to the invention, and is an apparatus for analyzing the intensity of light rays of each of predetermined wave lengths and measuring dispersed spectra with respect to measurement-target light rays having been reflected at a measurement target X. In addition, in an example described in this embodiment, light rays reflected at the measurement target X are handles as measurement-target light rays, but when a light emitting object, such as a liquid crystal display, is used, light rays emitted from the light emitting object may be handled as measurement-target light rays.

[0046]...

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Abstract

An actuator apparatus includes a pair of substrates facing each other; a plurality of bias actuators that each vary a gap dimension of a gap between the pair of substrates; a gap detection portion that detects the gap dimension; and a voltage control unit that controls driving of each of the bias actuators on the basis of the detected gap dimension. The bias actuators are located asymmetric relative to a driving central axis and are mutually independently driven; and the voltage control unit derives driving parameters for use in driving the bias actuators, on the basis of voltages and gap dimensions obtained by sequentially switching and driving the bias actuators on by one.

Description

BACKGROUND[0001]1. Technical Field[0002]The present invention relates to an actuator apparatus, an electronic device, a control method, and the like.[0003]2. Related Art[0004]Heretofore, there have been well known wave variable interference filters including a pair of substrates facing each other; reflecting films constituted of two groups of at least one reflecting film that are each disposed on a corresponding one of the pair of substrates and that face each other; and electrodes (electrostatic actuators) constituted of two groups of at least one electrode that are each disposed on a corresponding one of the pair of substrates and that face each other (refer to, for example, JP-A-2003-215473).[0005]In a Fabry-Perot etalon filter disclosed in JP-A-2003-215473, four electrostatic actuators that can be mutually independently driven are disposed in an area surrounding a pair of reflecting films, and each of the electrostatic actuators is connected to a detector. Further, for each of t...

Claims

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Application Information

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IPC IPC(8): H02N1/00G02B5/28
CPCH02N1/006G02B5/288G02B5/286B81B2201/031G01J3/26G02B26/001G01J3/10G01J3/505G01J3/027G05B11/14
Inventor HIROKUBO, NOZOMU
Owner SEIKO EPSON CORP
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