Substrate and method for monitoring positions of boundaries of film layer on the substrate

Abstract

The present invention provides a substrate and a method for monitoring positions of boundaries of a film layer disposed on a substrate. A plurality of sets of positioning units are provided in a non-display region of the substrate. Each set of the positioning units includes at least two primary positioning marks and corresponding primary positioning rulers. There are at least two secondary positioning marks and corresponding secondary positioning rulers disposed between the two adjacent primary positioning marks. The present invention determines a specific position of the boundaries of the film layer according to readings of the positioning rulers of the plurality of sets of positioning units corresponding to the boundaries of the film layer.

Description

[0001]This application claims filed Nov. 19, 2019 Chinese Patent Application No. 201911131299.3, entitled “Substrate and method for monitoring positions of boundaries of film layer on the substrate” in Chinese Priority Patent Application, the entire content of which is incorporated by reference in the present application.FIELD OF INVENTION[0002]The present application relates to the field of productions of liquid crystal displays, and in particular, to a substrate and a method for monitoring positions of boundaries of a film layer disposed on a substrate.BACKGROUND OF INVENTION[0003]Generally, alignment films of TFT LCDs are polyimide films (that is, PI alignment films), which allow liquid crystals to be neatly arranged in liquid crystal cells through physical or chemical action to form ordered pretilt angles so that the LCDs can display normally. A uniformity of a thickness of the PI alignment films is directly related to an alignment ability of the PI alignment films. Uniformity c...

AI Technical Summary

Benefits of technology

[0032]The beneficial effects of the claimed invention are: Compared with current method for monitoring positions of boundaries of a film layer disposed on a substrate, the present invention provides a plurality of sets of positioning units at positions corresponding to a non-display region around a substrate. Each set of positioning units is composed of a primary positioning mark and a corresponding primary positioning rule, and a secondary positioning mark and a secondary positioning rule nested under the primary positioning mark. With this design, an accuracy of confirming positions of boundaries of a film layer can be greatly improved, thereby shortening start-up time, increasing production capacity and reducing labor costs.

Problems solved by technology

Uniformity controls of the PI alignment films at edges of display regions have always been problems in TFT LCD processes.

Generally, offline manual measurements are adopted, which waste a lot of debugging time and reduce production efficiencies.

Therefore, current technologies have defects and urgently need improvements.

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