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Vacuum air removing technology for austenite stainless steel

An austenitic stainless steel and vacuum technology, which is applied in the field of degassing treatment, can solve the problems that the degassing effect of materials cannot be guaranteed, the outgassing rate of system materials increases, and the vacuum degree of the system cannot be improved, so as to avoid cooling too slow and degassing High gas efficiency and the effect of avoiding oil vapor pollution

Inactive Publication Date: 2007-12-19
INST OF MODERN PHYSICS CHINESE ACADEMY OF SCI
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Problems solved by technology

However, the degassing effect of the material obtained by the processing method of the prior art cannot be guaranteed, especially under ultra-high vacuum conditions, that is, the vacuum degree is lower than 10 -8 Under the condition of Pa, there is still a situation where the system material has an increased outgassing rate for a long time, and the vacuum degree of the system cannot be improved.

Method used

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  • Vacuum air removing technology for austenite stainless steel
  • Vacuum air removing technology for austenite stainless steel

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Embodiment Construction

[0017] Below in conjunction with accompanying drawing description:

[0018] The experiment carried out in accompanying drawings 1 and 2 is to heat the two samples to 500° C. respectively, and then keep them warm for a period of time while observing the outgassing situation of the samples. It can be seen from the figure that the sample starts to outgas during the heating process, and the outgassing volume without degassing is obviously larger than that degassed by the present invention. where H 2 The most obvious difference is 2 orders of magnitude (100 times). Water vapor is mainly adsorbed on the surface, so there is little difference between degassing and degassing, and it will be removed by on-site baking in the future. Oxygen is also mainly adsorbed on the surface, and it is easy to be pumped away, so the degassing mainly solves the large amount of H dissolved in the metal. 2 , CO and CO 2 The problem.

[0019] A specific embodiment of the present invention uses auste...

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Abstract

The invention discloses a technology method of taking degassing treatment to the material of super vacuum system and the device. It puts the material into the vacuum furnace to make the vacuum degree lower than 10-3Pa, heating the temperature to 500 + / -10 degree centigrade by the ratio of 3-6 degree centigrade and keeping for 20 minutes, heating to 950+ / -10 degree centigrade by the ratio of 25-35 degree centigrade. The keeping time is determined by each millimeter wall thickness per 60 minutes and cooling to 850 degree centigrade, adding high purity inertance gas into the furnace, and cooling to 600 degree centigrade in 15 minutes and cooling the work to below 80 degree centigrade. The invention is made up of vacuum, aspiring pump, furnace inner heating device, furnace inner temperature sensor, temperature control device, vacuum measuring device, liquid nitrogen cold trap and valve.

Description

technical field [0001] The invention relates to a process method for degassing austenitic stainless steel used in an ultra-high vacuum system, and a device used in the method. The process method of the present invention is to bake the material at a high temperature under vacuum conditions, and the equipment used is composed of a vacuum furnace, an air pump, a heating device in the furnace, a temperature sensor in the furnace, a temperature control device, a vacuum measuring device and valves. Background technique [0002] Austenitic stainless steel is the most widely used material for manufacturing various vacuum chambers and vacuum components due to its good mechanical and vacuum properties, easy processing, and low price. During the smelting process, a certain amount of gas will be dissolved inside the material, and this part of the gas is represented by H 2 Mainly. At normal temperature and normal pressure, the gas migration speed is almost zero, so the gas inside the m...

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C21C7/10
Inventor 杨晓天张军辉蒙峻张喜平胡振军候生军
Owner INST OF MODERN PHYSICS CHINESE ACADEMY OF SCI
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