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Pressure sensor employing thickness-cutting resonance for quartz crystal board

A pressure sensor, quartz crystal technology, applied in the field of pressure sensors, can solve problems such as low sensitivity

Inactive Publication Date: 2008-05-07
CENT SOUTH UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

This is why currently used body wave pressure sensors are still based on the principle of pressure-induced in-plane compression of quartz plates, this type of pressure sensor has a lower sensitivity

Method used

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  • Pressure sensor employing thickness-cutting resonance for quartz crystal board
  • Pressure sensor employing thickness-cutting resonance for quartz crystal board
  • Pressure sensor employing thickness-cutting resonance for quartz crystal board

Examples

Experimental program
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Embodiment approach

[0028] [implementation mode] such as figure 1 and figure 2 As shown, the invention consists of a quartz crystal plate 1, an auxiliary metal plate 2 and an end plate 3 for fixing the second plate and bearing the environmental pressure p, the end plate 3 being much harder than the plates 1 and 2. When connecting the end plate 3 with the quartz crystal plate 1 and the auxiliary metal plate 2, in addition to bonding them with super glue along the interface between them, four bolts 4 are also used to fasten them together. The entire plate structure is fixed on the two supports 5, so that under the action of p, the combined quartz crystal-auxiliary metal plate structure located between the two supports is in a pure bending state. In addition, the upper and lower surfaces of the quartz crystal plate are coated with thin-layer silver electrodes 6, and there is a micro-gap 7 between the quartz crystal plate and the auxiliary metal plate. Select Cartesian coordinate system X 1 x 2 ...

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Abstract

This sensor comprises: a crystal sheet with thickness about 1mm and length within 10-40mm, an auxiliary metal sheet, and an end sheet with length within 10-40mm to fix other two sheets and bear environmental pressure. Wherein, using high tenacity viscose to the interfaces between different sheets, setting four bolts to fix them together; fixing whole sheet structure on two supports to keep the combined quartz crystal-auxiliary metal sheet on pure-bending state when forcing pressure on the end sheet top; plating thin-layer Ag-electrode on crystal surfaces; and holding space between crystal sheet and metal sheet. This invention has high sensitivity and well temperature stability.

Description

[technical field] [0001] The invention relates to a pressure sensor, in particular to a pressure sensor which determines the pressure to be measured according to the measurement of the frequency drift of a quartz crystal plate. [Background technique] [0002] When the quartz crystal plate vibrates in an environment with a bias field or an initial field, the original natural frequency of the crystal plate will change, that is, the frequency drift, and its magnitude is completely determined by the bias field. Since the frequency drift is relatively easy to measure, people often measure the frequency drift to calculate the offset field and the environmental factors that cause these offset fields, such as environmental pressure, temperature, and inertial acceleration. The quartz pressure sensor uses the measurement of the frequency drift of the quartz resonator to determine the environmental pressure. The packaged quartz crystal resonator is placed in a pressure environment. The...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01L1/16
Inventor 胡元太杨嘉实郭少华
Owner CENT SOUTH UNIV
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