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Diamond film containing chronium and its preparing method

A diamond thin film and thin film technology, which is applied in the plating of superimposed layers, metal material coating process, ion implantation plating, etc. Sputtering efficacy, improved performance, high hardness effect

Inactive Publication Date: 2008-05-14
CHINA UNIV OF GEOSCIENCES (BEIJING) +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0009] The technical problem to be solved in the present invention is to overcome the defects of the existing single structure, single component DLC film and substrate, the defects of poor bonding force, high film brittleness, poor film wear resistance and the synthesis of DLC film by DC reactive magnetron sputtering method Existing target poisoning defect, provide a kind of chromium-containing diamond-like carbon film and preparation method thereof, it is a kind of hard chromium (Cr) DLC film that can exceed 2 μm film thickness that prepares by non-equilibrium magnetron sputtering method, it It has a dense multi-layer gradient structure, and has comprehensive excellent properties: high hardness, Vickers hardness exceeding 20GPa, good film / substrate bonding force, the critical load of the film-substrate bonding force>50N and the friction coefficient in the atmospheric environment does not exceed 0.2

Method used

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Examples

Experimental program
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Effect test

Embodiment 1

[0027] 1) Coating device

[0028] Using SP8050 coating machine (manufactured by Beijing Shiliyuan Science and Technology Co., Ltd.) to synthesize chromium-containing hydrogen-free DLC film by unbalanced magnetron sputtering method, the cross-sectional schematic diagram of the coating machine is as follows figure 1 As shown, four pairs of magnetron targets are placed in a cylindrical vacuum chamber, including two Cr targets and six C targets, and the C targets are graphite targets. The specification of the target is 420mm×8mm, and the purity is 99.99%. The two planar magnetron targets of each pair of magnetron targets are arranged face to face with an interval of 70 cm in the vacuum chamber. The workpiece holder is placed in the central area of ​​the vacuum chamber. A pulsed DC power supply applied to the workpiece to be deposited and four 40kHz pulsed medium-frequency AC power supplies applied to each pair of targets are used to control the negative bias voltage of the subst...

Embodiment 2

[0044] The film has a three-layer structure, from the surface of the substrate to the outside: Cr layer: 0.25μm; CrN 0.1 Layer: 0.45μm; Cr 0.1 Layer C: 1.45 μm.

Embodiment 3

[0046] The film has a six-layer structure, from the surface of the substrate to the outside: Cr layer: 0.20μm; CrN 0.6 Layer: 0.40μm; Cr 0.55 C 0.1 Layer: 0.85μm; Cr layer: 0.25μm; CrN 0.6 Layer: 0.45μm; Cr 0.55 C 0.1 Layer: 0.80μm;

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Abstract

This invention discloses a diamond film containing Cr and its preparation method. Said film is a H-free film containing Cr deposited in gas phase on a matrix surface having the alternative condensed multi-layer gradient structure of Cr, CrNx, CryCz, Cr, CrNx, CryCz layers orderly from inside to outside along the vertical direction of the matrix surface, the film thickness is not less than 2 mum, which has a fine film / matrix binding force and good wearability. The preparation method includes utilizing the magnet control sputtering system to coat, the magnet control targets are a pair of unbalanced magnet controlled Cr targets and 1-4 pairs of un-balanced magnet controlled C targets, the supply of which is 20-250KHz IF AC supply, a pulse matrix negative bias voltage is applied on the armed coating matrix by single-level pulse DC supply, the sputtering gas is Ar.

Description

【Technical field】 [0001] The invention relates to a chromium-containing diamond-like film and a preparation method thereof, in particular to a magnetron sputtering chromium-containing diamond-like film and a preparation method thereof. 【Background technique】 [0002] Due to the comprehensive properties of diamond-like carbon (DLC film) such as high hardness, low friction coefficient and wear resistance, as a wear-resistant protective film for cutting tools and molds, DLC film has attracted extensive attention from researchers. [0003] Commonly used DLC films are divided into hydrogen-containing DLC ​​films and hydrogen-free DLC films. The main disadvantages of hydrogen-free DLC films are: 1. The performance mismatch between the film and the substrate, resulting in poor bonding between the film and the substrate, especially the steel substrate; 2. There is high internal stress in the DLC film, which causes high brittleness of the film. , so the general film thickness is dif...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C23C28/00C23C14/35C23C14/06
Inventor 于翔刘阳于德洋王成彪
Owner CHINA UNIV OF GEOSCIENCES (BEIJING)
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