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Patterned grid element polarizer

一种图形、偏振方向的技术，应用在偏振元件、图纹面的照相制版工艺、仪器等方向，能够解决影响相干成像等问题

Inactive Publication Date: 2008-05-14
ASML HLDG NV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, only the parallel components of the electric field can interfere, so the polarization state of each ray on the wafer affects the coherent imaging

Method used

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Examples

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Embodiment Construction

[0018] The invention will now be discussed with reference to the drawings in which a numerical design of the various elements of the invention is given to enable those skilled in the art to make and use the invention.

[0019] In one embodiment, a patterned grid polarizer for use in lithography is presented. The polarizer includes a substrate transparent to ultraviolet (UV) light; and an array of cells patterned on the substrate, each cell polarizing the UV light.

[0020] patterned gate unit

[0021] The present invention provides UV polarizers patterned on substrates in various ways. In some aspects of the invention, the pattern of elements on the substrate dictates the polarization of light exiting the polarizer.

[0022] In some applications, it is beneficial for imaging to have a polarization pattern in the pupil of the lithographic system optics or projection optics illuminator for various reasons. For example, the polarization pattern can provide greater contrast o...

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Abstract

The invention relates to a patterned grid polarizer for use in lithography, comprising a substrate that is transparent to ultraviolet (UV) light; and an array of elements patterned on the substrate, wherein the elements polarize UV light. The array of elements can be patterned to produce tangentially or radially polarized UV light.

Description

technical field [0001] The invention relates to an optical unit for polarization. Background technique [0002] polarizer [0003] The simplest grid cell polarizer is a device that contains a grid of parallel conductive wires. When light is incident on the grid, each orthogonal component of radiation interacts differently with the wire grid polarizer. Field components parallel to the wires drive conduction electrons along the length of each wire, thereby generating a current. The electrons then collide with the lattice atoms, transferring energy to the lattice atoms and thereby heating the wire. Energy is thereby transferred from the field to the grid. In addition, the accelerated motion of the atoms parallel to the wire emits radiation in both forward and backward directions. The incident wave is canceled by re-radiation in the forward direction, resulting in little or no transmission of this field component. The propagation of radiation in the backward direction occ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G02B5/30G03F7/20G02B27/28H01L21/027
CPCG02B5/3075G02B5/3058G03F7/70566F24F13/10F24F13/20
Inventor 迈克尔·M·阿尔博特哈利·塞维尔
Owner ASML HLDG NV
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