Real-time batch sending system and method during manufacturing process
A technology for manufacturing process and batch delivery, which is applied in semiconductor/solid-state device manufacturing, electrical components, circuits, etc., can solve the problem of not taking into account the time spent, quality time management cannot be optimized, and reducing the efficiency of the semiconductor process delivery structure 10 and other issues to achieve the effect of improving efficiency and increasing efficiency
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[0020] Please refer to figure 2 , figure 2 It is a schematic diagram of the real-time batch sending system 30 in the manufacturing process of the present invention. The real-time batch sending system 30 in the manufacturing process includes a real-time sending module 32 , a manufacturing process execution system 34 , an automatic material handling system 36 , an equipment control system 38 , multiple machines 40 and a furnace tube 42 . The wafers can be processed sequentially through the machines 40 and furnace tubes 42 , wherein the machines 40 are used to process the wafers, and the furnace tubes 42 are used to perform thermal oxidation treatment on the wafers. The time for the furnace tube 42 to process wafers is usually longer than the time for each machine 40 to process wafers, which is the bottleneck of wafer processing. In order to optimize the performance of the machine 40 and the furnace tube 42, it is necessary to use To the quality time control (quality-time con...
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