Chip and two-way series sheet type oxygen sensor including such chip
An oxygen sensor and chip technology, applied in instruments, scientific instruments, electric solid devices, etc., can solve the problems of long working temperature, narrow detection range, cumbersome process, etc., and achieve the effect of fast response, compact and solid structure, and reduced volume
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[0041] Such as figure 1 As shown, a chip of bidirectional series chip oxygen sensor, it includes:
[0042] A current-limiting oxygen sensor 1, which is composed of a platinum electrode 13 printed on both surfaces of a zirconia electrolyte membrane 11 of a current-limiting oxygen sensor, and a platinum electrode 13 covered with a porous membrane 12;
[0043] A concentration cell type oxygen sensor 2, which is composed of a platinum electrode 23 printed on both surfaces of a concentration cell type zirconia electrolyte membrane 22,
[0044] A heating element 3, which is attached to the outside of the platinum electrode 23 of the concentration cell type oxygen sensor;
[0045] A sealed cavity 4, which is located on the three sides between the limiting current sensor 1 and the concentration battery sensor 2;
[0046] A cavity 5, which is surrounded by the limiting current type oxygen sensor 1, the concentration cell type oxygen sensor 2 and the sealed cavity 4;
[0047] The lim...
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