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Static broach exciting difference detection type miniature electric field sensor

An electric field sensor and sensor technology, applied in the field of sensors, can solve problems such as narrow measurement range, high cost, and difficulty in integration, and achieve the effects of improving sensitivity and precision, improving stability, and small excitation voltage

Active Publication Date: 2008-09-24
INST OF ELECTRONICS CHINESE ACAD OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The charge-inductive electric field sensors that appeared in the early days include rotary vane type and double-ball type, etc., which have the advantages of mature processing technology, large range and high precision, but have the disadvantages of large volume, complex structure, and high cost.
The optical electric field sensor has fast response speed and low noise, but has a narrow measurement range, high cost, and is not suitable for the detection of electrostatic fields.
Due to the limitations of processing technology, these sensors generally have the characteristics of large volume, complex structure, high cost and difficulty in integration, which are limited in application.

Method used

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  • Static broach exciting difference detection type miniature electric field sensor
  • Static broach exciting difference detection type miniature electric field sensor
  • Static broach exciting difference detection type miniature electric field sensor

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Embodiment Construction

[0022] Electrostatic comb tooth excitation of the present invention, the structure schematic diagram of differential detection type miniature electric field sensor as shown in Figure 1, wherein Fig. 1 (a) is the top view of the present invention, and Fig. 1 (b) is the side view of the present invention, mainly contains It consists of four parts: an electrostatic comb excitation part, a shielding electrode 3 , an induction electrode and a supporting beam part 6 .

[0023] Wherein, the electrostatic comb-teeth excitation part includes a fixed comb-teeth part 1 and a movable comb-teeth part 2, and the comb teeth can be in various shapes, and the sizes can be consistent or not. The fixed comb part 1 is fixed on the substrate 10 through a certain process, and the material of the substrate 10 can be single crystal silicon, polycrystalline silicon, metal or composite material, etc. And the movable comb part 2 is connected with the shielding electrode 3, and the shielding electrode 3 ...

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Abstract

A micro electric field transducer of static comb excitation differential detection type is prepared as setting positive induction electrode and negative induction electrode under shielding electrode or in the same plane of earthing shielding electrode, carrying out reciprocal and periodical vibration in said plane by shielding electrode under excitation of static comb to periodically shield and expose positive or negative induction electrode in order to let positive or negative induction electrode generate alternative induction current for realizing detection of external electric field.

Description

technical field [0001] The invention relates to a sensor, in particular to an electrostatic comb-tooth excitation and differential detection miniature electric field sensor. Background technique [0002] Electric field sensors are widely used in many fields such as aerospace, geology, environmental detection and industrial production, and play a very important role. For example, in the field of aerospace, in order to ensure the safe launch of the aircraft, the aerospace department attaches great importance to the real-time detection and monitoring of the strength of the atmospheric electric field before the launch of the aircraft; in the field of geosciences and environmental detection, electric field detection is widely used in atmospheric circulation research and geological disaster forecasting , Meteorological and dust forecasts, petroleum and mineral exploration, air pollution detection, etc. [0003] There are many types of electric field sensors. According to the work...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01R29/12G01R29/00
Inventor 夏善红彭春荣白强陈绍凤
Owner INST OF ELECTRONICS CHINESE ACAD OF SCI
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