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Micro-capacitor type microphone system and manufacturing method thereof

A micro-capacitor and microphone technology, which is applied in the field of microphone system and its manufacturing, can solve the problems of easy expansion and contraction of cMUT, small capacitance change, low sensitivity, etc., and achieve the effects of easy manufacturing and electronic integration, uniform frequency response and high precision

Active Publication Date: 2009-02-11
NEOMEMS TECH INC WUXI CHINA
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The end result of this reduced movement will be a smaller change in capacitance, even lower than the overall sensitivity of the microphone, so the sensitivity is low
[0007] In addition, the traditional cMUT design also has the disadvantage of easy expansion and contraction during manufacturing

Method used

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  • Micro-capacitor type microphone system and manufacturing method thereof
  • Micro-capacitor type microphone system and manufacturing method thereof
  • Micro-capacitor type microphone system and manufacturing method thereof

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Embodiment Construction

[0033] Please also refer to Figure 3-6 , the micro capacitive microphone system of the present invention comprises a retractable microphone array 40 (see Figure 5 and Figure 6 ), the microphone array 40 is composed of a certain number of microcapacitor units 30 periodically arranged at intervals along a radio frequency transmission line, thereby forming a capacitively loaded transmission line. For the specific structure of each microcapacitor unit 30, please refer to Figure 3-4 , including a silicon substrate 34 , the surface of the silicon substrate 34 is covered with a first layer of polysilicon film 36 and a silicon nitride film 39 . A second layer of polysilicon film 36 is stacked on the first layer of silicon nitride film 39 , and a doped layer is formed in the central part thereof as the lower electrode 35 . A second layer of silicon nitride film 39 is laminated on the second layer of polysilicon film 36 , and a capacitor film 32 is supported on the lower electrod...

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Abstract

A micro-capacitance type microphone system contains several telescopic microphone arrays composed of micro-capacitance type unit, said micro-capacitance containing low electrode, film supporting in low electrode, sealed vacuum space between film and low electrode, silicon base, center signal line covered on film surface, grounding electrode in two sides of film, transmission line composed of two grounding electrodes and center signal line. Said invention also provides a method for making said micro-capacitance type microphone system. Said invented capacitance microphone has high sensitivity, fine firmness and uniform frequency response used in broad band.

Description

technical field [0001] The present invention relates to a microphone system and a manufacturing method thereof, in particular to a wide-band micromachined (micromachined) condenser microphone system (hereinafter referred to as a microcapacitive microphone system) and a manufacturing method thereof. Background technique [0002] Capacitive Micromachined Ultrasonic Transducers (cMUTs), which have emerged recently, have become an important substitute for piezoelectric transducers. It can provide a wider set of parameters to optimize the performance of the transducer, and is easy to manufacture and electronic integration. The manufacture and operation of such ultrasonic transducers has been disclosed in numerous publications and patents. For example, US Patent Nos. 5,619,476, 5,870,351, 5,894,452, etc. disclose manufacturing techniques of capacitive ultrasonic transducers. The thin film of the capacitive ultrasonic transducer is supported on the substrate by several insulating...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H04R19/01H04R31/00
Inventor 王云龙
Owner NEOMEMS TECH INC WUXI CHINA