Optical element packaging method and its packaging structure
A technology of optical components and packaging methods, which is applied in the manufacture of electrical components, semiconductor devices, semiconductor/solid-state devices, etc., can solve problems such as the inability to use photosensitive components for alignment, and achieve the effect of improving process yield
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[0011] Please refer to Figure 2A to Figure 2H , which shows a flow chart of packaging an optical element according to a preferred embodiment of the present invention. The packaging method of the optical element in this embodiment includes the following steps. First, as shown in FIG. 2A , a substrate 100 is provided, on which a plurality of optical elements 110 are disposed, and the substrate 100 has at least two first alignment patterns 102 , 104 . The substrate 100 is preferably a CMOS wafer. At the same time, if Figure 2B As shown, a spacer 120 is provided, and the spacer 120 has several openings 125 and at least two through holes 122 , 124 . The spacer 120 is preferably formed by wafer etching, and its detailed formation steps are as follows. In the process of making the spacer, a wafer is provided, and a patterned photoresist layer is formed on the wafer, and finally several openings 125 and at least two through holes 122, 124 are etched on the wafer according to the...
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