An acceleration sensor in which a regulation plate is fixed with
adhesive onto a support frame of a sensor
chip of the sensor to limit the movement of a
mass portion of the sensor
chip within a predetermined gap range. In the acceleration sensor, the adhesion area of the
adhesive can be controlled to a predetermined value to prevent a variation of the sensitivity due to the variation of the adhesion area. The sensor
chip comprises the
mass portion, the frame surrounding the
mass portion and having on an upper surface of the frame a plurality of the recesses to fill
adhesive into, elastic support arms bridging the mass portion and the frame, and strain gauges formed on the elastic support arms. The regulation plate is fixed with paste onto the frame with the predetermined gap with an upper surface of the mass portion. The paste contains hard plastic balls, of a
diameter larger than the predetermined gap, mixed with adhesive. The adhesive is preferably of
silicon-rubber resin.