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Shaft seal dust-proof structure of turbo molecular pump

A technology of turbomolecular pump and dust-proof structure, which is applied to the components, pumps, and pump elements of pumping devices for elastic fluids, which can solve the problems of slow gas flow rate and insufficient particle resistance.

Active Publication Date: 2009-07-22
OSAKA VACUUM
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0011] This is because the flow rate of the purge gas becomes slow at the screw seal, etc., so that the resistance for preventing the intrusion of fine particles is insufficient.

Method used

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  • Shaft seal dust-proof structure of turbo molecular pump
  • Shaft seal dust-proof structure of turbo molecular pump
  • Shaft seal dust-proof structure of turbo molecular pump

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0029] figure 1 It is a longitudinal sectional view of the shaft seal portion of the first embodiment of the turbomolecular pump having a shaft seal dustproof structure of the present invention.

[0030] That is, 1 denotes a rotor, and this rotor 1 is hooked and fixed to a rotating shaft 2 inserted through the center thereof.

[0031] Moreover, the outer peripheral portion of the rotor 1, such as figure 2 As shown, there are a plurality of rotor blades 1d protruding radially in multiple stages. in addition, figure 2 shown as figure 1 A-A line sectional view of .

[0032] In the central portion of the disc (disc) 1a of the rotor 1, a boss 1b protruding in the axial direction is formed concentrically with the rotating shaft 2, and the outer peripheral portion of the boss 1b is rotatable with the boss 1b. A gap seal portion 3 a having a slight interval is formed between inner peripheral portions of guide brackets 3 inserted through the ground.

[0033] The rotating shaf...

Embodiment 2

[0048] image 3 It is a longitudinal sectional view of the shaft seal part of the embodiment 2 of the turbomolecular pump having a shaft seal dustproof structure of the present invention.

[0049] The second embodiment is different from the first embodiment in that the dustproof portion of the centrifugal blade is arranged on the upstream side of the gap seal portion.

[0050] which is, image 3 Among them, the central part of the disc 1a' of the rotor 1' has an axially protruding protrusion 1b', the outer peripheral part of the protrusion 1b', and the inner circumference of the guide bracket 9 rotatably inserted through the protrusion 1b'. A gap sealing portion 9a is formed between the portions.

[0051] Moreover, the lower end portion of the protrusion 1b' has a centrifugal impeller 10 coaxially arranged with the rotor 1', and the blades 10a of the centrifugal impeller 10 and the circular plate 11 arranged under the centrifugal impeller 10 form a centrifugal impeller. Bla...

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PUM

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Abstract

The invention provides a shaft seal dust-proof structure of a turbomolecular pump, which can prevent the corrosive gas and microparticles from invading the turbomolecular inside the pump motor housing. That is, in the turbomolecular pump in which the motor case (5) has a purge gas supply port (5a), the purge gas path from the motor case (5) to the pump chamber (8) is provided with a The gap sealing portion (3a) protruding from the outer periphery of the protrusion (1b) at the center of the disk (1a) of the rotor (1), and the centrifugal blade (1c) provided on the surface of the disk (1a) The shaft seal part composed of the dust-proof part (3b) of the centrifugal blade.

Description

technical field [0001] The invention relates to a turbomolecular pump especially suitable for vacuum exhausting of corrosive gas and dust-containing gas. Background technique [0002] Turbomolecular pumps are ultra-high vacuum pumps used to evacuate semiconductor manufacturing equipment and the like. [0003] Figure 5 Shown is a vertical cross-sectional view of an example of a conventional turbomolecular pump. [0004] Figure 5 Among them, a is an air inlet, b is an air outlet, and c is a rotor. [0005] On the outer peripheral portion of the rotor c, a plurality of rotor blades protrude radially in multiple stages. [0006] The rotor c is embedded and fixed to a rotating shaft d, and the rotating shaft d is supported by a motor housing through a driving motor e, a grease-lubricated ball bearing f, and the like. g. [0007] In order to prevent corrosive exhaust from intruding into the motor casing g, a dynamic pressure screw seal (seal) i is provided on the outer perip...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): F04D19/04
CPCF04D19/04F04D29/104
Inventor 大林哲郎井口昌司
Owner OSAKA VACUUM