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Method of polishing end surfaces of a substrate for a recording medium by a grain flow processing method

A technology for recording media and processing methods, applied in surface polishing machine tools, machine tools suitable for grinding workpiece edges, grinding/polishing equipment, etc., can solve the problems of polishing, difficulty in obtaining performance reliability, etc., and achieve high performance, The effect of high reliability

Inactive Publication Date: 2010-01-27
RESONAC HOLDINGS CORPORATION
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0009] However, the combined use of polishing brushes and slurries cannot advantageously polish substrates for recording media such as small hard disks (e.g., circular-shaped substrates with an inner diameter of not more than 7 mm)
Also, conventional slurries contain materials such as cerium oxide that are not easily removed by washing
In addition, in applications requiring high reliability performance, such as those using automotive hard drives (HD), residual cerium oxide can make it difficult to achieve satisfactory performance reliability

Method used

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  • Method of polishing end surfaces of a substrate for a recording medium by a grain flow processing method
  • Method of polishing end surfaces of a substrate for a recording medium by a grain flow processing method

Examples

Experimental program
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example 1

[0046] Thirty sheets of substrates (TS-10SX manufactured by Ohara Corporation) for hard disks (HD) were stacked, each substrate having a diameter (outer diameter) of 21.6 mm, a diameter (inner diameter of the central hole) of 6 mm, and a thickness of 0.421 mm , and then pass under the following conditions figure 1 The particle flow treatment device shown (EX-100 manufactured by Extrude-Horn Corporation) ground the end surfaces of these substrates to a mirror surface. The outer peripheral bottom surface and the inner peripheral end surface of the base included an edge surface of 0.181 mm and chamfered portions of 0.120 mm on both sides, respectively.

[0047] polishing:

[0048] 1. Polishing medium

[0049] Particle type, size: Diamond, #600 (average particle size, 30 microns)

[0050] Viscoelastic resin: product code EH020854

[0051] 2. Particle flow processing device

[0052] Cylinder diameter: 15 cm diameter

[0053] 3. Conditions in the device

[0054] Temperature: ...

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Abstract

The object of the invention is to provide a method of polishing the end surfaces of a substrate for a recording medium, which is capable of efficiently polishing the inner peripheral end surface and / or the outer peripheral end surface of the substrate preventing the reliability of performance of the recording medium from being impaired by the adhesion of the residual polishing material. According to the invention, there is provided a method of polishing end surfaces of a substrate for a recording medium wherein an inner peripheral end surface or an outer peripheral end surface of a substrate for a disk-like recording medium having a circular hole at the central portion thereof is brought into contact with a polishing medium obtained by dispersing polishing grains in a viscoelastic resin carrier and the polishing medium flows, thereby to polish the inner peripheral end surface or the outer peripheral end surface.

Description

[0001] Cross References to Related Applications [0002] This application is filed under 35 U.S.C §111(a) and claims priority under 35 U.S.C §119(e) to provisional application 60 / 608,103 filed September 9, 2004 under 35 U.S.C §111(b). technical field [0003] The present invention relates to a method of polishing an end surface of a substrate for recording media by a particle flow processing method and a method of manufacturing a substrate for recording media by utilizing the above method. Background technique [0004] Aluminum substrates are widely used as substrates of magnetic recording media such as magnetic disks. As the size of the disk is getting smaller and thinner, but at the same time the density of recorded data is getting higher and higher, so the aluminum substrate is gradually replaced by the glass substrate, which has superior surface flatness and substrate strength. As glass substrates for magnetic recording media, chemically strengthened glass substrates ar...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): B24B29/00G11B5/84B24B9/00
Inventor 羽根田和幸川上义男
Owner RESONAC HOLDINGS CORPORATION