Gas-tight test system leakage compensation apparatus and compensation process
A technology of compensation device and tester, which is applied in the direction of liquid tightness measurement by using liquid/vacuum degree, and by measuring the increase and deceleration rate of fluid, etc., can solve the problem that the sealing performance of the tester cannot be infinitely improved, and the leakage of the tester system cannot be finally eliminated , The detection accuracy of the tester is not ideal, etc., to achieve the effect of maintaining the air pressure, reducing the measurement error, and improving the accuracy of compensation
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[0038] The basic idea of the present invention is: the valve seat and the valve core constitute a retractable gas storage chamber, and the gas storage chamber communicates with the gas circuit of the tester; Air pressure: make the gas with higher pressure in the gas storage chamber flow to the gas path of the tester with lower pressure, and keep the gas pressure in the gas path of the tester relatively stable. Through active compensation, the system leakage of the tester is offset, the measurement error is reduced, and the detection accuracy is improved.
[0039] Considering that the system leakage of the tester is a micro-leakage, the speed and accuracy of compensation are extremely high, and the manual control method is difficult to meet the requirements, so the automatic control method is adopted. Therefore, in the device of the present invention, a controller, a servo motor and a linear motion mechanism are introduced to make the valve core move in a uniform linear motio...
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