Recovery of hydrofluoric acid
A recovery method and fluoric acid technology, applied in the fields of fluorine/hydrogen fluoride, heating water/sewage treatment, etc., can solve the problems of inoperable equipment and difficult on-site implementation, and achieve the purpose of preventing the decrease of heat transfer efficiency, simplifying equipment and preventing scale. Effect
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[0051] According to the recovery method of the present invention, purified hydrofluoric acid is recovered from the hydrofluoric acid waste liquid discharged from the etching process of the glass substrate. As the hydrofluoric acid waste liquid to be treated, a waste liquid having a concentration of 10% by weight and a concentration of metal components such as Si, B, Al, Ca, and Zt of 1% by weight was prepared. In the crude hydrofluoric acid evaporation process, the hydrofluoric acid waste liquid is supplied to the evaporation kettle (1) at a flow rate of 300cc / hour, and the hydrofluoric acid waste liquid is heated at 74° C. under a pressure condition of 100 Torr, and the crude hydrofluoric acid is recovered as steam, It is fed to the first distillation column (21). At this time, 98% sulfuric acid was added to the evaporator (1) at a flow rate of 3 cc / hour. In addition, by producing crude hydrofluoric acid, the hydrofluoric acid waste liquid was concentrated to a concentration...
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