Focal-distance and view-field-adjusting liquid microlens and its production
A manufacturing method and micro-lens technology, which is applied in the direction of lenses, optics, instruments, etc., can solve the problem that the field of view and the lens cannot be adjusted at the same time, and achieve the effect of precise focusing
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[0028] The embodiment of the microlens lens group with adjustable focal length and field of view of the present invention is as follows: 1) utilize the method for micro-injection molding to form the microcavity of microfluid in PDMS or other transparent film, concrete manufacturing process is as shown in Figure 4, obtains The plane layout of the microcavity is shown in Figure 5; 2) PDMS is bonded by pressure bonding after general plasma treatment (oxygen at 100---1500W, vacuum 500Torr microwave plasma treatment device for 15-60min) (about 1000Pa of pressure); 3) will inject the PDMS film that syringe liquid or water is injected into cavity and process with oxygen plasma to seal the injection port (the maximum pressure of cavity is about 10Psi); 4) Piezoelectric film outside PDMS microcavity ( PVDF) to apply a voltage (0-450V), or to apply a driving voltage (0-450V) to the original ring piezoelectric ceramics and axial piezoelectric ceramics (PZT) to change the curvature of the ...
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