Cantilevered electric resistance humidity sensing structure and manufacturing method therefor

A humidity sensing and cantilever technology, applied in the direction of material resistance, can solve the problems of increasing the difficulty of the process, the cost of the assembly, and the cumbersome process, so as to avoid the increase of the complexity of the process, improve the product yield and reduce the cost.

Inactive Publication Date: 2007-09-12
IND TECH RES INST
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The production process is not a coherent operation. It must first be divided into two processes, and finally go through a superimposed process. In this way, it must go through at least three independent processes. The process is more cumbersome and increases the difficulty of the process and the cost of construction.

Method used

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  • Cantilevered electric resistance humidity sensing structure and manufacturing method therefor
  • Cantilevered electric resistance humidity sensing structure and manufacturing method therefor
  • Cantilevered electric resistance humidity sensing structure and manufacturing method therefor

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Embodiment

[0021] The following FIGS. 3A to 3E describe in detail the manufacturing method of the cantilever resistive humidity sensing structure of the present invention.

[0022] Please refer to FIG. 3A. First, a substrate 30 such as a semiconductor material layer is provided. The substrate 30 has a first surface 30a and a second surface 30b. The first and second surfaces 30a, 30b are oxidized to form a first oxide layer. 301 and the second oxide layer 302.

[0023] Referring to FIG. 3B, a resistance sensing layer 31 is then formed on the first surface 30a of the substrate 30. The resistance sensing layer 31 is a material whose length changes to cause a change in resistance value, such as platinum (Pt), and the resistance The sensing layer 31 is a pattern having an effect of increasing sensing characteristics or reducing temperature.

[0024] Referring to FIG. 3C, a humidity sensing layer 32 is then formed on the resistance sensing layer 31. The humidity sensing layer 32 is a material...

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Abstract

These inventions disclose a cantilever type resistor humidity sensing structure and pass an imperial examination. This structure includes: (1) baseplate, possess first surface and second surface, and by oxygenation to form first and second oxidation layer, penetrating this first and second oxidation layer has a opening, at opening remain a cantilever;(2) resistance induction layer, formed on cantilever;(3) humidity induction layer, formed on resistance induction layer. This invention can directly supply converted humidity data, simplify product structure, remit structure intricacy result by capacitance induction of must using two relatively pole layer. Resistance induction layer and humidity induction layer locating on cantilever can form structure used in sensing environmental humidity, so one manufacture circuit will complete, and simplify process, advance product fine rate and reduce cost.

Description

technical field [0001] The present invention relates to a cantilever resistance humidity sensing structure and its manufacturing method, in particular to a cantilever resistance sensing structure capable of sensing ambient humidity and its manufacturing method. Background technique [0002] With the progress of the times, in addition to the traditional display of temperature / humidity, human beings also need to be able to accurately understand the humidity and temperature changes. Driven by industrial development and living needs, more and more applications are developing in the direction of portable electronic products, such as the driving comfort and safety of mobile phones or smart cars. In terms of environmental monitoring, the requirements for temperature and humidity sensing elements are high sensitivity and fast response, and the current temperature and humidity sensing technology is difficult to meet the above requirements. [0003] At present, humidity sensors inclu...

Claims

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Application Information

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Patent Type & AuthorityApplications(China)
IPC IPC(8): G01N27/12
Inventor陈荣泰李佳言邱以泰朱俊勋
OwnerIND TECH RES INST