Double freedom double decouple micro mechanical vibration gyrosope senser

A technology of vibrating gyroscope and degrees of freedom, which is used in gyroscope/steering sensing equipment, gyro effect for speed measurement, instruments, etc., can solve the modal coupling error of vibrating gyroscope drive, and is not conducive to improving gyroscope detection sensitivity, bandwidth and sensitivity Compromise contradictions and other issues to achieve the effect of increasing quality factor, small influence of coupling error, small process and quality factor
CN101050966AInactive Publication Date: 2007-10-10HARBIN INST OF TECH
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
HARBIN INST OF TECH
Publication Date
2007-10-10
Estimated Expiration
Not applicable · inactive patent

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Abstract

A micromechanical vibration gyroscopic transducer with double-freedom and double-decoupling is prepared for connecting driving direction bonding block to driving mass block through elastic beam and detection direction bonding block to the first freedom detection mass block through said beam as well as driving fixed electrode to driving fixed electrode bonding block, connecting active electrode to driving mass block and detection fixed electrode to detection direction bonding block as well as detection active electrode to the second freedom detection mass block being connected with the first one then setting isolation mass block between driving mass block and the first freedom detection mass block.
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Description

(1) Technical field

[0001] The invention relates to a sensor structure, in particular to a micromechanical vibration gyro sensor. (2) Background technology

[0002] Micro-mechanical inertial meters based on micro-electromechanical systems (MEMS) have the advantages of small size, low cost, and compatibility with integrated circuits, so they have broad application prospects.

[0003] Micromechanical gyroscope is a hot spot in the field of MEMS research in recent years. Vibrating micro-machined gyroscope is the main one. It is a microstructure based on the principle of Coriolis force. The working state of this type of gyroscope is affected by factors such as the quality and accuracy of the process, the temperature, air pressure, and damping during operation. There is a big compromise between the sensitivity of this gyro and the natural frequency of the detection mode and the natural frequency of the driving mode. In addition, there will be a certain coupling error between the drivi...

Claims

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