Double freedom double decouple micro mechanical vibration gyrosope senser

Abstract

A micromechanical vibration gyroscopic transducer with double-freedom and double-decoupling is prepared for connecting driving direction bonding block to driving mass block through elastic beam and detection direction bonding block to the first freedom detection mass block through said beam as well as driving fixed electrode to driving fixed electrode bonding block, connecting active electrode to driving mass block and detection fixed electrode to detection direction bonding block as well as detection active electrode to the second freedom detection mass block being connected with the first one then setting isolation mass block between driving mass block and the first freedom detection mass block.

Description

(1) Technical field [0001] The invention relates to a sensor structure, in particular to a micromechanical vibration gyro sensor. (2) Background technology [0002] Micro-mechanical inertial meters based on micro-electromechanical systems (MEMS) have the advantages of small size, low cost, and compatibility with integrated circuits, so they have broad application prospects. [0003] Micromechanical gyroscope is a hot spot in the field of MEMS research in recent years. Vibrating micro-machined gyroscope is the main one. It is a microstructure based on the principle of Coriolis force. The working state of this type of gyroscope is affected by factors such as the quality and accuracy of the process, the temperature, air pressure, and damping during operation. There is a big compromise between the sensitivity of this gyro and the natural frequency of the detection mode and the natural frequency of the driving mode. In addition, there will be a certain coupling error between the drivi...

AI Technical Summary

Problems solved by technology

There is a big trade-off between the sensitivity of this gyroscope and the natural frequency of the detection mode and the natural frequency of the driving mode

Moreover, there will be a certain coupling error between the vibratory gyro drive mode and the detection mode

These problems limit the application of this gyroscope

[0004] Traditional micromechanical vibrating gyroscopes usually use a single-degree-of-freedom detection method, that is, the detection direction has a single mass block. The detection bandwidth of this gyroscope is the difference between the driving natural frequency and the detection natural frequency, and the detection sensitivity of the gyroscope increases with the bandwidth. sharply reduced, resulting in a trade-off between bandwidth and sensitivity

In the design of the detection electrode, the pressure film damping detection method of parallel plates is usually used, which makes the quality factor of the detection direction very small, while the response of the traditional gyro detection mode is greatly affected by the quality factor, which further reduces the quality factor of the gyro. detection sensitivity

At the same time, the traditional gyroscope generally adopts a single-stage decoupling structure. When the gyroscope is driven, the detection mass moves with the driving mass, which will bring a certain coupling error to the detection mode.

These problems are not conducive to improving the sensitivity of gyro detection and increasing the working bandwidth

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