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Difference frequency type film acoustic wave resonator based micro-mass sensor

A bulk acoustic wave resonator, thin-film bulk acoustic wave technology, applied in the analysis of solids using sonic/ultrasonic/infrasonic waves, material analysis using sonic/ultrasonic/infrasonic waves, instruments, etc. The effect of overcoming influence, increasing sensitivity, increasing accuracy

Inactive Publication Date: 2008-01-16
INST OF ACOUSTICS CHINESE ACAD OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

In this way, it is very difficult to measure the extremely small mass

Method used

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  • Difference frequency type film acoustic wave resonator based micro-mass sensor
  • Difference frequency type film acoustic wave resonator based micro-mass sensor

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0047] This embodiment will detail the use of the present invention as a micro-mass sensor (refer to FIG. 1). This embodiment includes a mass sensing thin film bulk acoustic resonator (FBAR) 100 for mass sensing, and a reference frequency Thin film bulk acoustic resonator (FBAR) 200, first high-frequency oscillation circuit 300, second high-frequency oscillation circuit 400, DC / DC DC boost bias circuit 500, high-frequency amplifier circuit 600, high-frequency mixing circuit 700, Low-pass filter circuit 800 and frequency measurement and display device 900;

[0048] The working principle of this embodiment is as follows: The mass sensing film bulk acoustic resonator (FBAR) 100 for mass sensing and the first high-frequency oscillation circuit 300 together form a first high-frequency oscillator to generate a high-frequency signal f 01 (E.g. f 01 = 1GHz). When the mass load on the mass sensing film bulk acoustic resonator (FBAR) 100 changes slightly, the frequency of the output signal ...

specific Embodiment approach

[0057] Example 1

[0058] This embodiment will detail the use of the present invention as a micro-mass sensor (refer to FIG. 1). This embodiment includes a mass sensing thin film bulk acoustic resonator (FBAR) 100 for mass sensing, and a reference frequency Thin film bulk acoustic resonator (FBAR) 200, first high-frequency oscillation circuit 300, second high-frequency oscillation circuit 400, DC / DC DC boost bias circuit 500, high-frequency amplifier circuit 600, high-frequency mixing circuit 700, Low-pass filter circuit 800 and frequency measurement and display device 900;

[0059] The working principle of this embodiment is as follows: The mass sensing film bulk acoustic resonator (FBAR) 100 for mass sensing and the first high-frequency oscillation circuit 300 together form a first high-frequency oscillator to generate a high-frequency signal f 01 (E.g. f 01 = 1GHz). When the mass load on the mass sensing film bulk acoustic resonator (FBAR) 100 changes slightly, the frequency of...

Embodiment 2

[0071] This embodiment will detail the application of the present invention as a selective substance mass sensing in a gas environment (refer to FIG. 3). The same parts as in Example 1 will not be repeated.

[0072] It can be seen from FIG. 3 that the mass sensitive area of ​​the thin film bulk acoustic resonator (FBAR) 100 for mass sensing in this embodiment is the sensitive area of ​​the upper electrode 101 and the support layer 105. A layer of selective gas adsorption membrane 108 is placed in the area. In actual applications, only the selective gas adsorption membrane 108 is exposed to the gas environment to be monitored, and other parts are isolated from the gas environment to be monitored.

[0073]When gas molecules to be adsorbed appear in the monitored gas environment, the selective gas adsorption film 108 adsorbs the gas molecules, and thus acts on the thin film bulk acoustic resonator (FBAR) for mass sensing The mass load of 100 increases, thereby causing the resonant fr...

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Abstract

The invention relates to a micro-mass sensor based on beat frequency type thin film bulk acoustic resonator; the micro-mass sensor comprises a quality sensing thin film bulk acoustic resonator used in quality sensing, the thin film bulk acoustic resonator used to generate reference frequency, a first and a second high frequency oscillatory circuits, a high frequency amplification circuit, a high frequency mixing circuit, a lowpass filter circuit and a frequency measuring and display device; wherein the first and the second high frequency oscillatory circuits are respectively connected with the quality sensing thin film bulk acoustic resonator and the thin film bulk acoustic resonator and compose a first and a second high frequency oscillators. When the quality load on the quality sensing thin film bulk acoustic resonator has micro-variation, the frequency of high frequency signals output from the first high frequency oscillator generates micro-deviation; after being amplified, the reference high frequency signals generated from the second high frequency oscillator is output into the high frequency mixed circuit with the high frequency signals output from the first high frequency oscillator; both of the reference high frequency signals generated from the second high frequency oscillator and the high frequency signals output from the first high frequency oscillator are mixed together and then are output into the lowpass filter circuit; hence frequency variation generated by micro-mass load can be obtained and be output through the frequency measuring and display device.

Description

Technical field [0001] The invention relates to a micro-mass sensor for high-precision measurement of extremely small masses, in particular to a micro-mass sensor based on a difference frequency thin film bulk acoustic resonator (FBAR). Background of the invention [0002] The micro-mass sensor is a sensor that converts tiny mass changes into frequency signals. It is being used more and more in chemical and biological environments for the analysis of the composition of gases and liquids, the measurement of micro-mass, the measurement of film thickness, and pressure detection. In terms of military and security, it also has very important uses. It can be used for toxic gas detection and explosive detection in populated places such as subways, buses, theaters, etc., to prevent terrorist incidents from occurring. [0003] The currently known Quartz Crystal Microbalance (QCM) is a typical micro-mass sensor and is widely used in different fields. This sensor uses the resonance characte...

Claims

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Application Information

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IPC IPC(8): G01N29/12G01N29/22
Inventor 乔东海汤亮邓英田静
Owner INST OF ACOUSTICS CHINESE ACAD OF SCI
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