Phase shifting lateral direction shearing interferometer

A technology of transverse shearing and interferometer, which is applied in the direction of instruments, scientific instruments, optical radiation measurement, etc., can solve the problem of non-adjustable interferometer shearing amount, and achieve the goal of automatic processing, performance improvement, sensitivity and measurement accuracy Effect

Inactive Publication Date: 2008-01-30
SHANGHAI INST OF OPTICS & FINE MECHANICS CHINESE ACAD OF SCI
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Problems solved by technology

[0006] The prior art [4] (see Sanjib Chatterjee. "Measurement of single-pass wavefront distortion of optical components with phase shifting Jamin interferometer". Optical Engineering, Vol.43, No.4, 872-8799, 2004) describes a Jamin-based The phase-shifting transve

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  • Phase shifting lateral direction shearing interferometer
  • Phase shifting lateral direction shearing interferometer
  • Phase shifting lateral direction shearing interferometer

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Embodiment Construction

[0026] Referring first to FIG. 1 , FIG. 1 is a schematic structural diagram of an embodiment of a phase-shifting transverse shearing interferometer according to the present invention. As can be seen from the figure, the phase-shifting transverse shearing interferometer of the present invention is composed of a first polarizer 1, an input parallel plate 2, a second polarizer 3, a third polarizer 4, a first shearing plate 5, a second polarizer Two shear plates 6, output parallel plates 7, quarter wave plates 8, analyzers 9, CCD cameras 10 and computer processing systems 11.

[0027] The first polarizer 1 is on one side of the input parallel plate 2 and in its incident light path. The incident beam is at 45° to the input parallel plate 2 . The input parallel flat plate 2 and the output parallel flat plate 7 have the same material and thickness and are placed in parallel. The first shearing plate 5 and the second shearing plate 6 are identical in material and thickness and place...

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Abstract

A phase shift transverse shear interferometer consists of a first polarizer, an input parallel plate, a second polarizer, a third polarizer, a first shear plate, a second shear plate, an output parallel plate, a quarter wave plate, a detecting deflection machine, a CCD camera and a computer, the phase shift transverse shear interferometer is an equal optical path interference optical system, the shear quantity can be continuously adjusted, which is very applicable to the wavefront measurement of the short interference length, and satisfies the wavefront measurement of the different light beam bore and the measurement precision.

Description

technical field [0001] The invention relates to optical interferometry, and is a phase-shifting transverse shearing interferometer, in particular a phase-shifting transverse shearing interferometer with equal optical path interference and continuously adjustable shearing amount. Background technique [0002] The transverse shearing interferometry is to interfere the wavefront to be measured with its replica wavefront, avoiding the systematic error introduced when using the standard wavefront, it has a simple structure, low environmental requirements and high measurement accuracy, with its unique Advantages play an increasingly important role in wavefront measurements. Introducing phase-shifting technology into the transverse shearing interferometer to form a phase-shifting transverse shearing interferometer can further improve its performance, such as improving sensitivity and measurement accuracy, realizing automatic processing of interferograms, and giving three-dimensiona...

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Application Information

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IPC IPC(8): G01J9/02G01B9/02G02B7/18
CPCG01J9/0215
Inventor 王利娟刘立人孙建锋周煜
Owner SHANGHAI INST OF OPTICS & FINE MECHANICS CHINESE ACAD OF SCI
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