Phase shifting lateral direction shearing interferometer

Abstract

A phase shift transverse shear interferometer consists of a first polarizer, an input parallel plate, a second polarizer, a third polarizer, a first shear plate, a second shear plate, an output parallel plate, a quarter wave plate, a detecting deflection machine, a CCD camera and a computer, the phase shift transverse shear interferometer is an equal optical path interference optical system, the shear quantity can be continuously adjusted, which is very applicable to the wavefront measurement of the short interference length, and satisfies the wavefront measurement of the different light beam bore and the measurement precision.

Description

technical field [0001] The invention relates to optical interferometry, and is a phase-shifting transverse shearing interferometer, in particular a phase-shifting transverse shearing interferometer with equal optical path interference and continuously adjustable shearing amount. Background technique [0002] The transverse shearing interferometry is to interfere the wavefront to be measured with its replica wavefront, avoiding the systematic error introduced when using the standard wavefront, it has a simple structure, low environmental requirements and high measurement accuracy, with its unique Advantages play an increasingly important role in wavefront measurements. Introducing phase-shifting technology into the transverse shearing interferometer to form a phase-shifting transverse shearing interferometer can further improve its performance, such as improving sensitivity and measurement accuracy, realizing automatic processing of interferograms, and giving three-dimensiona...

AI Technical Summary

Problems solved by technology

[0006] The prior art [4] (see Sanjib Chatterjee. "Measurement of single-pass wavefront distortion of optical components with phase shifting Jamin interferometer". Optical Engineering, Vol.43, No.4, 872-8799, 2004) describes a Jamin-based The phase-shifting transverse shear interferometer of the interferometer, which moves one of the double wedges slightly to produce a phase shift, but the shear amount of the interferometer is also not adjustable, and it is only approximate during the phase shift equal optical path coherence

Images