Integration type programmable crystal growth control system

A crystal growth control, integrated technology, applied in crystal growth, single crystal growth, chemical instruments and methods, etc., can solve whether the crystal grows normally, whether the growth rate is normal or not, the crystal weight is small, and the seed crystal does not fall off. problems such as crystals, to achieve the effect of ensuring the quality of crystal growth

Inactive Publication Date: 2008-07-16
SHANDONG UNIV
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Problems solved by technology

[0004] For the growth of high-temperature hot-melt crystals, after the seed crystal is fixed on the seed rod and placed in the growth furnace, the growth of the crystal cannot be directly observed, and it is impossible to kn

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  • Integration type programmable crystal growth control system

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Embodiment

[0013] The overall structure of the control system is shown in the accompanying drawings. The measurement signal of the temperature sensor 1 is amplified by the low-noise temperature sensor preamplifier 2 and input to the 24-bit high-precision A / D converter 4 through the low-noise temperature sensor preamplifier 2 and converted into a digital signal. After that, it is input into the microprocessor 5, and the microprocessor 5 performs PID control and regulation on the heating power of the heater according to the input temperature signal. According to the detection range of the crystal growth temperature, the temperature sensor 1 adopts PT100 or thermocouple, and the preamplifier 2 of the temperature sensor 1 adopts an ultra-low noise operational amplifier. The measurement range of the preamplifier 2 is limited to the maximum variation range of temperature adjustment during the crystal growth process, so as to maximize the temperature measurement resolution and thereby improve th...

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Abstract

The invention provides an integrated programmable crystal growth control system, comprising a temperature sensor, a microprocessor, a heater, a seed rod rotation step motor, a crystal drawing step motor and a weighing sensor. The temperature sensor and the weighing sensor are connected with a two-way signal switch respectively through an amplifier arranged in front of the temperature sensor and a weighing sensor amplifier; the two-way signal switch, an A/D converter and the microprocessor are connected with each other; the heater is divided into at least two ways, each of which is connected with the microprocessor; the seed rod rotation step motor and the crystal drawing step motor are connected with the microprocessor through a respective driver. The invention integrates temperature control and motor speed control into a whole, and can control fluctuation speed of temperature, rotational direction of motors, rotational speed and rotational time accurately by programming, and the invention can confirm the crystal growth situation by weighing the crystal weight and control temperature, speed and rotational direction during the growth process of the crystal in time, thus ensuring the growth quality of the crystal.

Description

technical field [0001] The invention relates to an integrated and programmable crystal growth control system, which belongs to the technical field of crystal growth. Background technique [0002] The current traditional crystal growth control system generally uses a general-purpose temperature control system to control the crystal growth temperature. The general-purpose temperature control system controls the temperature with a large range and relatively low accuracy. Taking the general-purpose FP23 as an example, when the control range is 0~100°C, the control accuracy is 0.01°C, which is obviously insufficient for the temperature control requirement of crystal growth with a daily cooling of about 0.1°C to achieve a balanced temperature drop. [0003] In addition to precise temperature control, the crystal growth process must also control the rotation of the crystal according to a certain law. For some high-temperature grown crystals, it must be pulled up at a certain speed....

Claims

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Application Information

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IPC IPC(8): C30B15/20C30B15/30
Inventor 张晓阳黄柏标秦晓燕段爱东
Owner SHANDONG UNIV
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