FIFO data storage system containing multiple capture channels and and method thereof

Abstract

The invention provides a multi collecting channel delay first-in-first-out data memory system and a relative method. The memory system comprises serially connected a multi-channel collector, a first-in-first-out memory controller, a memory unit and a multi-channel buffer. The invention is characterized in composed of a measurer and a collection adjuster serially connected with the multi-channel collector. The invention uses the delay and phase relation between the measurement signals of the measurer and uses the collection adjuster to control the signal delay of each channel. The inventive method tests the signal delay and phase relation of each channel to set the collection delay value of each channel, realize the first-in-first-out data collection and storage of free time delay between multi collecting channels, eliminate the delay and phase difference of signals, and accurately recover the one-to-one projection of signals.

Description

technical field [0001] The invention belongs to the technical field of data acquisition, and in particular relates to a multi-acquisition channel delay first-in-first-out data storage system. The invention also relates to a multi-acquisition channel delay first-in-first-out data storage method, especially for multi-channel signals with strict arbitrary specific delay and phase difference, eliminating the delay and phase difference between signals, and accurately recovering between signals. First-in-first-out data storage method with inherent one-to-one mapping relationship. Background technique [0002] Now that the field of semiconductor lithography has entered the era of nano-lithography, the lithography system has become more and more complex, and the accuracy and precision of signal acquisition are also getting higher and higher. Small calculation errors or judgment deviations in the system will eventually reflect on the product process, which may lead to a decline in p...

AI Technical Summary

Problems solved by technology

The structure adopted in this technology is divided into two levels of first-in-first-out storage, and in the first-level first-in-first-out storage, each data channel uses a separate first-in first-out memory, and as the number of channels increases, the cost will increase. It also becomes complicated to implement, and this technique only adjusts the phase difference of the sampling pulse in one sampling period

For any specific delay between signals between channels, if the delay relationship between signals is greater than one sampling period, it is still impossible to achieve multi-channel data acquisition and storage at any time

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