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Piezoelectric element and head for jetting liquid

A piezoelectric element and piezoelectric film technology, which is applied in the direction of electrical components, piezoelectric devices/electrostrictive devices, piezoelectric/electrostrictive/magnetostrictive devices, etc., can solve the problem that the piezoelectric film is easily damaged

Inactive Publication Date: 2008-08-20
SEIKO EPSON CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Therefore, when a voltage is applied to the piezoelectric film, damage such as cracks may occur
Especially the piezoelectric film in the area corresponding to the end of the lower electrode in the length direction is easily damaged

Method used

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  • Piezoelectric element and head for jetting liquid
  • Piezoelectric element and head for jetting liquid
  • Piezoelectric element and head for jetting liquid

Examples

Experimental program
Comparison scheme
Effect test

no. 1 approach

[0038] 1 is a schematic structural view of a printer (an example of a liquid ejection device) using an ink jet recording head (an example of a liquid ejection head) having a piezoelectric element. In this printer, a tray 3 , a discharge port 4 , and operation buttons 9 are provided on a main body 2 . In addition, the main body 2 has an inkjet recording head 1 , a paper feeding mechanism 6 , and a control circuit 8 .

[0039] The ink jet recording head 1 has a piezoelectric element manufactured by the manufacturing method of the present invention. The inkjet recording head 1 can eject ink from the nozzles in response to an ejection signal supplied from the control circuit 8 .

[0040] The main body 2 is a frame of the printer, and a paper feeding mechanism 6 is arranged at a position where paper 5 can be supplied from a tray 3 , and an inkjet recording head 1 is arranged so as to print on paper 5 . The tray 3 is configured to supply the unprinted paper 5 to the paper feeding...

no. 2 approach

[0070] 8 is a schematic exploded perspective view showing a recording head in the second embodiment, FIG. 9 is a plan view and a B-B' sectional view of FIG. 8 , and FIG. 10 is a schematic view showing a layered structure of a piezoelectric element. In addition, the same code|symbol is attached|subjected to the same member as the member demonstrated in 1st Embodiment, and overlapping description is abbreviate|omitted.

[0071] This embodiment is another example of the layer structure of the piezoelectric element. Specifically, as shown in FIGS. patterned and arranged continuously along the direction in which the pressure generating chambers 12 are juxtaposed. In addition, in the present embodiment, the end surface of the lower electrode film 60A in the region facing each pressure generating chamber 12 is an inclined surface inclined at a predetermined angle with respect to the surface of the flow path forming substrate 10 .

[0072] The piezoelectric film 70A is provided indep...

no. 3 approach

[0091] 16 is a plan view and a cross-sectional view of an ink jet recording head in a third embodiment.

[0092] This embodiment is an example in which a metal layer is provided on the vibrating film near the end of the piezoelectric film 70A, and is the same as the second embodiment except that the metal layer is provided. Specifically, as shown in FIG. 16 , near the end portion in the longitudinal direction of the piezoelectric film 70A, a metal layer 61 is provided, which is formed of the same layer as the lower electrode film 60A but is different from the lower electrode film 60A. Not conductive. In addition, the piezoelectric films 70A extend to a part of these metal layers 61 .

[0093] In addition, in the present embodiment, the metal film 61A provided near the end portion of the piezoelectric film 70A on the guide electrode 90 side is separately provided for each piezoelectric element, and the guide electrode is extended on the metal layer 61A. 90. On the other hand...

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PUM

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Abstract

Provided are a piezoelectric element in which favorable crystallinity can be obtained with improved uniformity, breakage of a piezoelectric film can be prevented, and thereby stable displacement properties can be obtained, a liquid-jet head using the piezoelectric element. The piezoelectric element includes a lower electrode, a piezoelectric film formed on the lower electrode, and an upper electrode formed on the piezoelectric film, wherein the piezoelectric film includes a lower layer portion having column crystals, and an upper layer portion having column crystals which are continuous from those in the lower layer portion and have sizes larger than those in the lower layer portion.

Description

[0001] This application is a divisional application of the application with the application number 03814872.2, the application date is June 24, 2003, and the title is "Piezoelectric element and liquid ejection head and its manufacturing method". technical field [0002] The present invention relates to a piezoelectric element and a liquid ejection head using the piezoelectric element, in particular to a method for manufacturing a piezoelectric element capable of uniform crystal orientation on a wafer plane and uniform piezoelectric characteristics. Background technique [0003] A piezoelectric element is an element in which a piezoelectric film exhibiting an electromechanical conversion function is sandwiched between two electrodes, and the piezoelectric film is composed of crystallized piezoelectric ceramics. [0004] Conventionally, a so-called sol-gel method has been known as a method for manufacturing a piezoelectric element. That is, the sol of the organometallic compou...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L41/08H01L41/09B41J2/14B41J2/045B41J2/055B41J2/135B41J2/16H01L41/187H01L41/22H01L41/318H01L41/43
Inventor 村井正己
Owner SEIKO EPSON CORP
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