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XYY precision positioning platform calibration method

A calibration method, precise positioning technology, applied in the direction of machine/stand, supporting machine, photolithography process exposure device, etc.

Active Publication Date: 2008-09-10
SHANGHAI MICRO ELECTRONICS EQUIP (GRP) CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0019] The technical problem solved by the present invention is to provide a calibration method of an XYY precision positioning platform that solves the problems of actuator calibration, decoupling and telescopic sensor calibration in one process

Method used

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  • XYY precision positioning platform calibration method
  • XYY precision positioning platform calibration method
  • XYY precision positioning platform calibration method

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Embodiment Construction

[0072] The calibration method of the XYY precision positioning platform of the present invention will be described in detail below in conjunction with the accompanying drawings.

[0073] image 3 It is an arrangement method of the XYY platform in the lithography machine. Above the platform 1, there is a position sensor 2, which can detect the position of the platform 1. Since the position sensor 2 is independent of the platform 1, it can accurately detect the position of the platform 1 regardless of whether the platform 1 is calibrated or not. In other embodiments of the present invention, the position sensor 2 can also be installed on the side or under the platform 1 , as long as it is independent from the platform 1 .

[0074] Calibration is divided into three steps, and the order cannot be reversed. The details are as follows:

[0075] Step 1: Actuator Calibration

[0076] see Figure 4 , where F is the control value from the controller. In order to calibrate the act...

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PUM

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Abstract

The invention provides a calibration method for an XYY precision positioning platform. The method is used for completely solving the problems of executor calibration, decoupling and telescopic sensor calibration in single flow. The method is realized by arranging a separated position sensor at the external of the XYY precision positioning platform and orderly accomplishing the executor calibration, the telescopic sensor calibration and decoupling matrix calibration. The method sufficiently uses the position sensor which is independent of the platform. The position sensor is not only used for decoupling, but also used for the executor calibration and the telescopic sensor calibration. Besides, with the superposition property of matrix operation, the decoupling process can be simplified. The calibration method is high in precision, fast in speed, and capable of realizing fully automatic calibration. For lithography tools, the calibration method can be realized by using the prior devices in the lithography tools without arranging extra special devices.

Description

technical field [0001] The invention relates to a calibration method of a platform, in particular to a calibration method of an XYY precision positioning platform used in the chip manufacturing industry. Background technique [0002] Precision positioning stages are important tools in the field of precision machining. For example, when a lithography machine manufactures a chip, it fixes the silicon wafer and the mask on two precision positioning platforms, so that the pattern on the mask can be copied to the silicon wafer. [0003] Publication No. CN2777335Y's Chinese patent "a three-degree-of-freedom precision positioning platform" discloses a precision positioning platform, which has a telescopic mechanism in the X direction (realized with a cam and elastic flexible parts in this patent), and a Y direction with Two telescopic mechanisms, the schematic diagram of which can be referred to figure 1 , the coordinate system is drawn in the figure, where Rz represents the dire...

Claims

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Application Information

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IPC IPC(8): F16M11/10F16M11/20G03F7/20
Inventor 吴刚
Owner SHANGHAI MICRO ELECTRONICS EQUIP (GRP) CO LTD
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