Compensation method of temperature drift of pressure sensor

Abstract

The invention relates to a makeup method of temperature drifting of a pressure sensor. The method comprises: the function related to the temperature of the pressure responding sensitivity is S(T); the resistance change delta R of the sensor under a pressure is equal to the arithmetic product of the pressure value delta R and the pressure responding sensitivity is S(T), namely delta R=S(T)*delta P; the output signal of the sensor V<(INP-INN)> is equal to the quotient that the incentive of arithmetic product of the voltage applied to the sensor V and the change of the resistance dental R under the pressure dividing the resistance R under the zero pressure of the sensor, namely V<(INP-INN)>=V*delta R / R=V*S(T)* delta P / R; Characterized in that the pressure sensor uses the integrated voltage of the voltage of constant temperature coefficient and the voltage of the ratio temperature coefficient as the incentive voltage; the temperature makeup function by the incentive voltage C(T) is 1 / S(T) is approximately equal to A+B*T. The invention effectively avoids the errors caused by the temperature change of the pressure sensor.

Description

technical field [0001] The invention relates to the relevant technical field of integrated circuit design applied to signal conditioning of piezoresistive pressure sensors, in particular to a compensation method for temperature drift of pressure sensors. Background technique [0002] With the development of semiconductor technology, people have manufactured silicon piezoresistive pressure sensors. Generally, four resistors with equal resistance are formed on the silicon chip by diffusion or ion implantation, and they are connected into a Wheatstone bridge. as attached figure 1 shown. [0003] Due to material characteristics, the pressure response characteristics of this pressure sensor are different at different temperatures. attached figure 2 is a pressure sensor at a constant excitation voltage V IB Pressure response curves at different temperatures. In applications with relatively large temperature changes, it is necessary to make corresponding temperature compensat...

AI Technical Summary

Problems solved by technology

[0005] The purpose of the present invention is to provide a compensation method for the temperature drift of the pressure sensor, which solves the problem of the error caused by the different output of the existing resistive pressure sensor at different temperatures

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