Method for processing polishing cloth surface texture flow passage
A processing method and polishing cloth technology, which are applied in metal processing equipment, grinding/polishing equipment, manufacturing tools, etc., can solve the problems affecting the surface smoothness and surface hardening of the wafer, reduce scratches, improve the smoothness, and simplify the process. Effect
- Summary
- Abstract
- Description
- Claims
- Application Information
AI Technical Summary
Problems solved by technology
Method used
Image
Examples
Embodiment Construction
[0016] As shown in FIG. 1 , a method for processing a textured flow channel on the surface of a polishing cloth uses a hot pressing method to press a desired textured flow path on the surface of the polishing cloth.
[0017] The above-mentioned hot pressing method first arranges the polishing in the high-frequency electromagnetic field between the upper and lower electrodes, so that the internal molecules are polarized and move and rub against each other, so as to generate heat by themselves, and then the surface of the polishing cloth 1 is placed on the pressure roller with convex texture. 2. The reticulated flow channel formed under rolling.
[0018] In the above-mentioned hot pressing method, firstly, the temperature of the convex-textured pressing roller used is raised, and then under the condition of high temperature and high pressure, the convex-textured pressing roller rolls on the surface of the polishing cloth to form the surface textured flow channel 3 .
[0019] As ...
PUM
Abstract
Description
Claims
Application Information
- R&D Engineer
- R&D Manager
- IP Professional
- Industry Leading Data Capabilities
- Powerful AI technology
- Patent DNA Extraction
Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic, Popular Technical Reports.
© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap|About US| Contact US: help@patsnap.com