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SPM high resolution graphics data processing method

A technology of graphics data and processing methods, applied in the directions of image data processing, analysis materials, image enhancement, etc., can solve the problems of high-resolution and clear images, SPM is difficult to achieve fast scanning, etc., to improve imaging quality, wide application range, and easy operation Flexible and Simple Effects

Inactive Publication Date: 2011-01-26
INST OF ELECTRICAL ENG CHINESE ACAD OF SCI
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Problems solved by technology

[0005] The purpose of the present invention is to overcome the problem that the traditional SPM is difficult to achieve fast scanning and produce high-resolution clear images. If high-performance scanners, complex control algorithms, complex scanning mechanical probes, etc. are required, the present invention proposes a widely applicable Based on the high-resolution graphic data processing method of SPM, the error signal is fully used to compensate the imaging signal without changing the system hardware facilities, so as to realize the fast scanning and high-resolution imaging of SPM

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  • SPM high resolution graphics data processing method
  • SPM high resolution graphics data processing method
  • SPM high resolution graphics data processing method

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Embodiment Construction

[0027] Such as figure 1 , figure 2 Shown, the specific operation steps of the present invention are as follows:

[0028] The SPM laser emits a beam of laser light 1 and hits the probe of the cantilever beam, and enters the four-quadrant photoelectric sensor after being reflected by the probe.

[0029] (1) Control the stepping motor under the piezoelectric ceramic scanner to make the measured sample approach the scanning probe, and keep the force between the probe and the sample at the reference point value 3 set by the user.

[0030] (2) The computer controls the driving voltages Ux and Uy in the X and Y directions respectively to move the sample in the horizontal direction.

[0031] (3) When the sample moves to a certain point to be measured, the force (such as van der Waals force) between the probe and the sample changes due to the surface topography of the point, so that the cantilever beam undergoes a corresponding bending deformation, Causes a shift in the position of...

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Abstract

The invention relates to a method for processing SPM high resolution graphic data, and is characterized in that error signals are adopted to conduct algorithmic compensation for original imaging data. A PID feedback controlling method is used for scanning the SPM in a Z direction. The original imaging data (Uz) and the error data (error) of each scanning spot are recorded. On one hand, the original imaging data (Uz) drives piezoceramics to move in the Z direction; on the other hand, Uz is stored as the imaging data. The error data (error) is compensated to the original imaging data through a modulation factor, thus forming a higher resolution image signal: Uz' is equal to Uz plus Lambada k*Error'.

Description

technical field [0001] The invention relates to a high-resolution graphic data processing method, in particular to an SPM high-resolution graphic data processing method. Background technique [0002] With the continuous development of nanotechnology, SPM technology, which is an important basis for the development of nanotechnology, has also made great progress. SPM (Scanning Probe Microscope), that is, scanning probe microscope, including scanning tunneling microscope STM, atomic force microscope AFM, and near-field optical microscope SNOM, etc., are a series of microscopes that scan and image the sample based on the probe. The most representative of SPM are STM and AFM. The working principle of AFM is to fix the probe on a cantilever beam that is very sensitive to force, and make the force between the probe and the surface atoms of the measured sample (such as van der Waals During scanning, the force between the probe and the sample changes due to the shape change of the s...

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G06T5/00G01Q30/04G01Q30/06
Inventor 陈代谢韩立林云生
Owner INST OF ELECTRICAL ENG CHINESE ACAD OF SCI
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