This invention relates to a kind of precision test method of lithium ionizaation cell cavity leak and its device. The steps as follows: (1) vacuumize phase, time control at T1:3 to 5 second within, flip the inner vacuum of cell cavity to a certainty value P1;if vacuum degree within T1 can not achieve P1 value, it illustrate battery cavity has obvious leak, judge for badness; (2) keep balance phase: time control at T2:2 to 3 second within, keep cell cavity sealing, keep its vacuum level, stabilize gas path, suppress interference;(3) detection phase: clean display of initiating electron vacuum gauge, time control at T3:1 to 4 second within, detect cell cavity inner vacuum degree's variance delta P, if delta P greater than set value, then cell cavity has micro leak, judge for badness;(4) complete phase, time control at T4:0.2 to 0.5 second, restore cell cavity to normality. This device can proceed automatic discrimination to badness cell, advance detect precision and/or efficiency.