Low-radiation cover glass and use thereof

A low-radiation, glass technology, applied in glass furnace equipment, glass manufacturing equipment, manufacturing tools, etc., can solve problems such as insufficient

Inactive Publication Date: 2008-11-05
SCHOTT AG
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0009] Also shows that controlling uranium and thorium content alone is not enough
Instead, the inventors have demonstrated that correspondingly low uranium and thorium contents are a necessary but not sufficient condition for glasses with low alpha radiation

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Embodiment Construction

[0060] The present invention shall be described below with reference to examples.

[0061] Glasses according to the invention were produced using the down-draw method with the following compositions, wherein each produced flat glass had a width of 430 mm. The thickness of the glass is between 0.3-0.8 mm.

[0062] Glass Composition I:

[0063] SiO 2 64.8% by weight

[0064] Na 2 O 6.25% by weight

[0065] K 2 O 6.7% by weight

[0066] ZnO 5.6 wt%

[0067] al 2 o 3 4.2% by weight

[0068] B 2 o 3 7.9% by weight

[0069] TiO 2 4.0% by weight,

[0070] Sb 2 o 3 0.55% by weight

[0071] Total 100% by weight

[0072] Glass Composition II:

[0073] SiO 2 50.3% by weight

[0074] BaO 20.0% by weight

[0075] B 2 o 3 12.7% by weight

[0076] TiO 2 4.7% by weight

[0077] al 2 o 3 11.3% by weight

[0078] As 2 o 3 0.7% by weight

[0079] SrO 0.20% by weight

[0080] CaO 0.1 wt%...

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Abstract

The invention relates to a low-radiation cover glass for radiation-sensitive sensors, with low intrinsic a-radiation, in particular for use with semiconductor technology. The glass includes a glass composition, selected from the following: aluminosilicate glass, aluminoborosilicate glass, borosilicate glass, in particular borosilicate glass that is devoid of alkali, with a TiO2 content of >0.1 - 10 % by weight, in particular 1 - 8 % by weight.

Description

technical field [0001] The invention relates to a low-radiation cover glass (cover glass) and its application. Background technique [0002] For certain sensors on semiconductor substrates, such as CCD sensors, special low-radiation glass is required for packaging. Such a CCD sensor (Charge-coupled Device; ladungsgekoppeltes Bauteil) represents an integrated circuit for light detection (for example, it is used in a digital camera or a video camera) and represents a position-resolved (fine scanning) sensor. Ground) photosensitive electronic components that measure light intensity. CCDs consist of semiconductors and thus belong to semiconductor detectors. [0003] In such sensors, alpha radiation in particular is evaluated particularly critically. The negative effects of radioactive radiation on CCD sensors are described, for example, in TECHNICAL No. TH-1087 and JP 04-308669. Sensors covered with such glass are severely damaged by their radiation, especially their alpha r...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C03B18/02C03B5/43C03C3/091
CPCC03C3/091C03C3/093C03B18/02C03B5/43
Inventor 安德里斯·韦伯霍尔格·韦格纳赖因哈德·卡斯纳彼得·布里克斯
Owner SCHOTT AG
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