Electrostatic driven F-P cavity MEMS wavelength tunable filter

An electrostatic drive, electrostatic drive technology, applied in instruments, nonlinear optics, optics, etc., can solve the problems of large reduction of wide beam, inconsistent thickness, and reduced filter efficiency selection light utilization, and achieve the effect of improving filter efficiency.

An electrostatic drive, electrostatic drive technology, applied in instruments, nonlinear optics, optics, etc., can solve the problems of large reduction of wide beam, inconsistent thickness, and reduced filter efficiency selection light utilization, and achieve the effect of improving filter efficiency.

CN101320187AInactive Publication Date: 2008-12-10INST OF OPTICS & ELECTRONICS - CHINESE ACAD OF SCI
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  • Electrostatic driven F-P cavity MEMS wavelength tunable filter
  • Electrostatic driven F-P cavity MEMS wavelength tunable filter
  • Electrostatic driven F-P cavity MEMS wavelength tunable filter

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Embodiment Construction

[0018] The present invention will be described in detail below in conjunction with the accompanying drawings and specific embodiments.

[0019] In this embodiment, an electrostatically driven F-P cavity MEMS wavelength tunable filter with a radius of 100 μm in both the front cavity surface and the rear cavity surface is taken as an example, and the present invention is described in detail with reference to the accompanying drawings.

[0020] figure 1 It is a three-dimensional schematic diagram of an electrostatically driven F-P cavity MEMS wavelength tunable filter of this embodiment; An insulating layer 9 is grown on it to separate the silicon substrate 10 from the electrostatically driven F-P cavity MEMS wavelength tunable filter, and the material of the insulating layer 9 can be silicon dioxide or silicon nitride; the electrostatically driven F-P cavity MEMS wavelength of the present embodiment The F-P cavity in the adjustable filter is located in the center of the whole s...

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Abstract

The preset invention discloses a static-driven F-P cavity MEMS tunable wavelength filter which comprises an F-P cavity. The F-P cavity MEMS tunable wavelength filter is characterized in that the perimeter of the F-P cavity is connected with four static drivers; wherein, the upper electrode panels of the four static drivers are respectively connected with the front cavity face of the F-P cavity through four connecting rods, and the lower electrode panels of the four static drivers are fixed on the same plane as the rear cavity panel of the F-P cavity; the front cavity face of the static-driven F-P cavity MEMS tunable wavelength filter of the present invention can be moved horizontally under the driving of the static drivers; therefore, the reflected light of the front cavity face and the rear cavity face are parallel to increase the filtering efficiency and the light use ratio of the F-P cavity MEMS wavelength tunable filter. The F-P cavity MEMS wavelength tunable filter of the present invention has the advantages of small volume, low energy consumption, simple structure and easy manufacture. The F-P cavity MEMS wavelength tunable filter can be widely used in the optical fiber communication systems.

Description

technical field [0001] The invention relates to the technical field of micro-opto-electromechanical systems, in particular to an electrostatically driven F-P cavity (Fabry-Perot cavity) MEMS wavelength tunable filter suitable for optical fiber communication systems. Background technique [0002] In the field of wavelength tunable filters, electrostatically driven MEMS wavelength tunable filters have the advantages of small size, low energy consumption, fast response, low driving voltage, and good compatibility with integrated circuits, and are widely used in optical fiber communication systems. favor. The existing electrostatically driven MEMS wavelength tunable filters all adopt F-P cavity structure, the front cavity surface is a thin film with both reflection and transmission, and the periphery is fixed; the rear cavity surface is fixed and is a total reflection surface. When a driving voltage is applied between the front and rear cavity surfaces, the front cavity surface...

Claims

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Application Information

Patent Timeline
10 Dec 2008
Publication
CN101320187A
IPC
G02F1/21
Inventors
姚军; 王大甲