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Suspended structure subwavelength guided mode resonant terahertz high efficiency narrowband filtering method

A technology of guided mode resonance and suspended structure, which is applied to waveguide devices, optical filters, electrical components, etc., can solve the problems of low filtering efficiency and wide bandwidth, improve quality factor, overcome device asymmetry, and reduce loss Effect

Inactive Publication Date: 2018-11-16
北京科易达知识产权服务有限公司
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Problems solved by technology

[0004] The invention discloses a suspended structure sub-wavelength guided mode resonance terahertz high-efficiency narrowband filtering method, which overcomes the bottleneck of the existing terahertz filtering technology in high efficiency and narrowband - low filtering efficiency and wide bandwidth

Method used

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  • Suspended structure subwavelength guided mode resonant terahertz high efficiency narrowband filtering method
  • Suspended structure subwavelength guided mode resonant terahertz high efficiency narrowband filtering method
  • Suspended structure subwavelength guided mode resonant terahertz high efficiency narrowband filtering method

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Embodiment 1

[0032] according to figure 1 , figure 2 As shown, the filter device of the present invention is mainly composed of a substrate 1, a terahertz resonant structure 2 and a support 3 of a suspended structure to form a two-dimensional umbrella array structure; wherein,

[0033] The substrate 1 is a high-resistance silicon substrate, polymethyl methacrylate or polyimide;

[0034] The patterned film structure 2 is made of high-resistance silicon, polymethyl methacrylate or polyimide material, and its shape is selected from geometric figures such as circle, star, square, etc., which can obtain a high resonance quality factor ;

[0035] The support structure 3 is made of silicon dioxide material.

Embodiment 2

[0037] according to image 3 As shown, the filter device preparation process of the present invention includes the following steps:

[0038] 1. Deposit a silicon dioxide layer b on the high-resistance silicon substrate a by using a chemical vapor deposition process;

[0039] 2. Using a plasma sputtering process to sputter high-resistance silicon on the silicon dioxide layer b to form a high-resistance silicon film c;

[0040] 3. Spin-coating nano-imprint photoresist d on the high-resistance silicon film c by using a photoresist spin-coating process;

[0041] 4. Using nanoimprint template manufacturing technology to prepare nanoimprint template e according to filter device design requirements;

[0042] 5. Nanoimprint lamination f;

[0043] 6. The structure g obtained by separating the nanoimprint template e from the high-resistance silicon film c;

[0044] 7. The structure i obtained by removing the imprint photoresist after reactive ion etching of high-resistance silicon b...

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Abstract

The invention provides a suspended structure subwavelength guided mode resonant terahertz high efficiency narrowband filtering method, which is a new filtering method. At the same time, a device prepared by the method and a preparation method are provided, the filtering efficiency does not decrease as the wavelength becomes longer, and the filtering bandwidth does not broaden as the wavelength becomes longer, thereby enabling efficient and narrowband filtering. The filter of the invention adopts a high-resistance silicon resonant structure suspension technology, which improves the filtering efficiency and the quality factor of the guided mode resonance, reduces the loss of the resonant structure, and reduces the bandwidth; and the two-dimensional array structure is adopted to overcome thedevice asymmetry problem.

Description

technical field [0001] The invention provides a suspended structure sub-wavelength guided mode resonance terahertz high-efficiency narrow-band filtering method, and also provides a device prepared by the method and a preparation method, belonging to the technical field of electronic filtering. Background technique [0002] Terahertz waves have unique characteristics such as time-domain pulse, low energy, spectral fingerprint, and broadband. THz imaging and THz spectroscopy have broad applications in the fields of physics, physical chemistry, materials science, biomedicine, environmental science, security inspection, and satellite communications. application prospects. The frequency of terahertz waves is from 0.1THz to 10THz, and the frequency bandwidth is generally 3THz. In order to obtain high-quality imaging and THz spectrum applications, narrow-band filtering is a must-have technique. The emerging terahertz filtering technologies in the world are mainly based on structu...

Claims

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Application Information

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IPC IPC(8): G02B5/20H01P1/20H01P11/00
CPCG02B5/20H01P1/20H01P11/007
Inventor 石东海王庆康
Owner 北京科易达知识产权服务有限公司
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