Side wall electrode of large length to diameter ratio and manufacturing method thereof

Abstract

The invention belongs to the technical field of an electronic device which relates to a side wall electrode of a big length-diameter ratio electrodes and a preparation method thereof. The length directions of the big length-diameter ratio electrodes are mutually parallel and are parallel to a base piece; if the layer number of the electrodes is larger than two, the layers are stacked and arrayed, solid insulation materials are filled between every two layers of big length-diameter ratio electrodes, the big length-diameter ratio electrodes are different parts which are mutually electric insulated in a length direction, a gap exists between every two parts, and gaseous or liquid insulating materials are filled in the gap. The method comprises the following steps: an electrode material film is deposited on the surface of the base piece, and an big length-diameter ratio electrode array is formed by using a graph transferring method; if the side wall electrode is a single-layer electrode, a graph which contains the electrode gap is directly formed; if the side wall electrode is a multilayer electrode, the solid insulation materials are deposited on the surface of the electrode material, a stacking structure of multilayer big length-diameter ratio electrodes is prepared, and the electrode gap is formed again. The invention has a higher electric field reinforcing coefficient, and the polarization characteristics of other electric fields can be optimized in a more controllable mode.

Description

technical field [0001] The invention relates to an electrode in the technical field of electronic devices and a manufacturing method thereof, in particular to a sidewall electrode with a large aspect ratio and a manufacturing method thereof. Background technique [0002] The geometric shape of the electrode with a large aspect ratio has a columnar or band-like structure, and its scale is greater than 10 in the order of magnitude in one dimension within the three-dimensional coordinates. 1 μm, whose size is defined as the length; in the other two dimensions within the three-dimensional coordinates, its scale is less than 10 in the order of magnitude 0 μm, and on the plane defined by these two dimensions, its geometric shape can be equivalent to a circle with equal area, the radius of the circle is defined as the radius, and the ratio of the length to the radius is defined as the major diameter Ratio, a large aspect ratio electrode refers to an electrode with an aspect ratio ...

AI Technical Summary

Problems solved by technology

In terms of geometric characteristics, its characteristic is that the diameter of the electrode can be very small (the smallest, repeatable recording is about 1nm), but the length is usually only a few tens of microns or less, and its spatial arrangement is irregular, and the gaps in the array Difficult to control, the geometry of the individual electrodes in the array is often quite non-uniform

Therefore, its electric field concentration effect is difficult to control and accurately predict, making device design and optimization difficult

On the other hand, its performance will be greatly compromised due to the electric field shielding effect and the lower average length

Finally, the electrode gap of this type of electrode system is difficult to reach the level of a few microns. Even if such a small gap is realized, the unevenness of the electrode surface will become very significant, which will greatly reduce the controllability of the device and improve the Difficulty of Calibrating Devices

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