Gas supply device, semiconductor manufacturing device and component for gas supply device
A technology for gas supply and manufacturing equipment, applied in semiconductor/solid-state device manufacturing, gas/liquid distribution and storage, electrical components, etc., can solve problems such as shortening period and production reduction, and achieve the effect of reducing metal impurities and improving productivity
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[0025] Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.
[0026] figure 1 It is a figure which schematically shows the structure of the gas supply apparatus which concerns on embodiment of this invention. exist figure 1 In the gas supply device 1 shown, as the gas control mechanism, a manual valve 2, a pressure control mechanism (regulator) 3, a pressure sensor 4 for pressure detection, and a check valve 5 are provided in this order from the upstream side of the gas supply direction. , On-off valves 6a, 6b, a mass flow controller 7 as a flow control mechanism, and a metal filter 8.
[0027] In addition, at the gas inlet of the gas supply device 1 ( figure 1 The left side) end portion is provided with a gas supply pipeline connection block (block) 20 for connecting the gas supply pipeline from the gas supply source. A filter 20b is inserted into the pipe connection port 20a of the gas supply pipe connection base 2...
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Abstract
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