Solid state imaging device, its manufacturing method, and imaging device
A solid-state imaging device and technology for imaging devices, which are applied in semiconductor/solid-state device manufacturing, radiation control devices, image communication, etc., can solve problems such as difficulty in implementing an insulating layer, and achieve the effect of noise reduction
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[0076] The following will refer to the figure 1 A cross-sectional view of a solid-state imaging device (first solid-state imaging device) according to an embodiment (first example) of the present invention will be described.
[0077] Such as figure 1 As shown, the solid-state imaging device 1 includes a photosensitive portion 12 that performs photoelectric conversion of incident light L in a semiconductor substrate (or semiconductor layer) 11 . On the side portion of the photosensitive portion 12 , a peripheral circuit portion 14 formed with a peripheral circuit (not specifically shown) is provided with the pixel separation region 13 interposed therebetween. The following description will be made using the semiconductor substrate 11 . On the light-receiving face 12s of the photosensitive portion (including a hole collection layer 23 to be described later) 12, an interface state lowering layer 21 is formed. The interface state reduction layer 21 is made of, for example, si...
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