Accurate one-dimensional rotary and two-dimensional tilting table

Abstract

The invention discloses a one-dimensional rotation and two-dimensional inclination working platform, which comprises a pedestal, a bottom layer board, a middle layer board, an upper layer board, an adjusting mechanism and a driving part. The bottom layer board and the upper layer board achieve the inclination of the working platform in a mutually orthogonal direction respectively, while the middle layer board achieves the rotation of the working platform in a larger range in a plane vertical to the two orthogonal directions. The pedestal is connected with the bottom layer board through a rotating pair, a wedged slide block and a spring, a linear guide way is fixed on a bottom plate, and the wedged slide block supports the bottom layer board; the bottom layer board is connected with the middle layer board through a cambered guide way and a central rotating shaft; and the middle layer board is also connected with the upper layer board through the rotating pair, the wedged slide block and the spring, the linear guide way is fixed on the middle layer board, and the wedged slide block supports the upper layer board. The adjusting mechanism comprises a coarse adjusting structure and a fine adjusting structure. The invention can achieve the work demands of the one-dimensional rotation and the two-dimensional inclination for the working platform, and can achieve the angle positioning of a sub-angle second-time level in a larger space adjusting range.

Description

technical field [0001] The invention relates to a precision angle adjustment workbench, in particular to a one-dimensional rotation and two-dimensional tilt positioning workbench structure for space rough adjustment and fine adjustment. Background technique [0002] The precision angle adjustment table has a wide range of applications in precision machining, optical element adjustment, micro-electro-mechanical systems, biomedicine and other fields. How to achieve three-dimensional angular positioning with different ranges and precision requirements in a compact adjustable space is a difficult and key issue in the development of a rotary table. At present, precision adjustment technology is developing rapidly, and nanopositioning technology has been widely used in precision adjustment mechanisms, such as optical phase shifting interference, adaptive adjustment technology, electrostrictive micro-displacement movement mechanism, etc. Nano-positioning technology combined with t...

AI Technical Summary

Problems solved by technology

[0003] In traditional industrial production, angle adjustment often uses angle adjustment samples or adjustment tools such as plug gauges. This method has poor reliability and low adjustment accuracy.

In the existing industrial fields such as mechanical processing, the large-scale rotary table generally adopts the engraving method to measure the rotation angle, which is difficult to achieve high-precision precise positioning, and the moving speed is slow, mostly for one-dimensional angle adjustment; while the common precision rotary table The mechanism mostly focuses on the adjustment of one or two degrees of freedom, and at the same time has the defect of small rotation range

The prior art [1] (Chinese invention patent, publication number: 1716456A) has provided a long-stroke, nanoscale one-dimensional mobile worktable structure, and a similar principle can be used for a rotary workbench, but the transmission structure of this device is complicated and difficult Realize multi-degree-of-freedom angle measurement in a compact space, and the versatility is poor, generally only used in some special measurement fields

The prior art [2] (the Newport Resource, Motion Control: Manual Rotation Stages and Motorized Rotation Stages.2006 / 2007, P.901-914) describes various types of rotary and tilting rotary worktables, which can realize rotation and tilting Multiple degrees of freedom are required, but these workbenches are mostly used for alignment, coplanar and orthogonal adjustments of small optical components. The adjustment range of the degree of freedom of rotation is small, the carrying capacity is limited, and manual adjustment is mostly used, making it difficult to achieve precise angular positioning

The prior art [3] (Chinese invention patent, publication number: CN1669744A) provides a six-degree-of-freedom precision positioning workbench, which can achieve nanometer-level positioning accuracy, but the mechanism adopts a flexible hinge connection method, and there is coupling during actual movement. Difficult to achieve precise positioning

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