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Method for manufacturing package structure with reconfigured crystal particle by net-shaped structure

A technology for reconfiguring and packaging methods, applied in semiconductor/solid-state device manufacturing, electrical components, electrical solid-state devices, etc., and can solve the problems of reduced reliability of packaging structure, warpage of the encapsulation body, and difficulty in increasing the cutting process.

Active Publication Date: 2009-05-20
CHIPMOS TECH INC
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The thinned die is redistributed on another substrate, and then a plurality of dies are formed into a package by injection molding; because the die is very thin, the encapsulant is also very thin, so when After the sealant is separated from the substrate, the stress of the sealant itself will cause the sealant to warp, increasing the difficulty of the subsequent cutting process
[0006] In addition, after the wafer is diced, when relocating the die on another substrate with a size larger than the original substrate, it is necessary to pick up the die through a pick & place device, and then place the die After flipping, the active surface of the die is attached to the substrate in a flip-chip manner, and in the process of flipping the die by the pick-and-place device, it is easy to generate tilt (tilt) and cause displacement, for example: tilt exceeding 5 microns, Therefore, the crystal grains will not be aligned, and then the alignment will not be possible in the subsequent ball planting process, resulting in a decrease in the reliability of the package structure.

Method used

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  • Method for manufacturing package structure with reconfigured crystal particle by net-shaped structure
  • Method for manufacturing package structure with reconfigured crystal particle by net-shaped structure
  • Method for manufacturing package structure with reconfigured crystal particle by net-shaped structure

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Embodiment Construction

[0066] The direction of the present invention discussed here is a packaging method for reconfiguration of dies, in which a plurality of dies are reconfigured on another substrate and then packaged. In order to provide a thorough understanding of the present invention, detailed steps and components thereof will be set forth in the following description. Clearly, the practice of the invention is not limited to specific details of the manner in which chips are stacked, with which those skilled in the art are familiar. On the other hand, the well-known chip formation method and the detailed steps of the back-end process such as chip thinning are not described in detail to avoid unnecessary limitations of the present invention. However, for the preferred embodiments of the present invention, it will be described in detail as follows, but in addition to these detailed descriptions, the present invention can also be widely implemented in other embodiments, and the scope of the presen...

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Abstract

The invention relates to an encapsulating structure for rearrangement of a crystal grain, which comprises the crystal grain which is provided with an active surface and a lower surface and is provided with plurality of welding pads on the active surface, an encapsulating body, a plurality of fan-out metal segments, a protective layer and a plurality of conductive components, wherein the encapsulating body is used for wrapping five surfaces of the crystal grain and exposing the plurality of the welding pads on the active surface of the crystal grain, one end of each of the plurality of the fan-out metal segments is electrically connected with the plurality of the welding pads, the protective layer is used for covering the active surface of the crystal grain and the plurality of the metal segments and exposing the upper surface at the other end of each metal segment, and the plurality of the conductive components are electrically connected with the other ends of the plurality of the metal segments.

Description

technical field [0001] The present invention relates to a packaging method for crystal grain reconfiguration, in particular to a packaging method for crystal grain reconfiguration by means of a network structure on a substrate. Background technique [0002] Semiconductor technology has developed quite rapidly, so the miniaturized semiconductor die (Dice) must have diversified functional requirements, so that the semiconductor die must be configured with more input / output pads ( I / O pads), so that the density of metal pins (pins) has also increased rapidly. Therefore, the early lead frame packaging technology is no longer suitable for high-density metal pins; therefore, a ball array (Ball Grid Array: BGA) packaging technology has been developed. The ball array package has the advantage of higher density than the lead frame package. In addition, its solder balls are less prone to damage and deformation. [0003] With the popularity of 3C products, such as: cell phone (CellPh...

Claims

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Application Information

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IPC IPC(8): H01L21/50H01L21/56H01L21/60H01L21/78H01L23/31H01L23/488H01L23/34
CPCH01L24/19H01L24/96H01L24/20H01L21/568H01L2224/12105H01L2224/19H01L2224/20H01L2224/73267H01L2924/18162H01L2924/3511
Inventor 齐中邦
Owner CHIPMOS TECH INC
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