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Magnetoelasticity performance simultaneous on-line detecting method of iron magnetic thin film

A technology of ferromagnetic thin film and detection method, applied in the direction of material magnetic variables and other directions

Inactive Publication Date: 2009-05-27
TSINGHUA UNIV
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Problems solved by technology

The equibiaxial stress state and the assumption of uniform stress and curvature distribution cannot be satisfied in actual situations. Therefore, the uniform stress distribution of the film can only be obtained from the curvature using the Stoney formula

Method used

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  • Magnetoelasticity performance simultaneous on-line detecting method of iron magnetic thin film
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  • Magnetoelasticity performance simultaneous on-line detecting method of iron magnetic thin film

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Embodiment Construction

[0035] The specific implementation manner of the present invention will be further described below in conjunction with the accompanying drawings, but the protection scope of the present invention should not be limited thereby.

[0036] figure 1 It is the schematic diagram of the magnetoelastic property simultaneous on-line detection method of the ferromagnetic thin film of the present invention, in which the first laser 1a, the second laser 1b, the first beam expander 2a, the second beam expander 2b, the sample 3, the second beam expander 2b are included in the figure. A grating 4a, a second grating 4b, a lens 5, a filter screen 6, a CCD camera 7, a polarizer 8, an analyzer 9, and a photodetector 10.

[0037] The first laser 1a, the first beam expander 2a, the first grating 4a, the second grating 4b, the lens 5, the filter screen 6, and the CCD camera 7 constitute a film non-uniform stress measurement optical path, and the first laser 1a emits The laser light reaches the surf...

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Abstract

An online detection method for magnetoelasticity performance of thin-ferromagnetic-film, which belongs to the field of engineering materials, structure deformation, and mechanical test. The device implementing the method of the invention comprises a thin-ferromagnetic-film non-uniform stress measuring light path and a film hysteresis loop measuring light path, wherein, the film non-uniform stress measuring light path comprises a laser, a beam expander, a grating, a lens, a filter screen, and a CCD camera; and the film hysteresis loop measuring light path comprises a laser, a beam expander, a polarizer, an analyzer, and a photodetector. The method of the invention comprises the steps of measuring non-uniform curvature of the thin-ferromagnetic-film surface by shearing interferometer to obtain the non-uniform stress in film, and measuring the hysteresis loop of the film by using magnetooptic Kerr effect of the thin-ferromagnetic-film surface. The method can simultaneously online measure the non-uniform stress and the hysteresis loop of thin-ferromagnetic-film, so as to provide experimental basis for the research on magnetoelasticity coupling behavior of the thin-ferromagnetic-film.

Description

technical field [0001] The invention relates to a simultaneous on-line detection method for the magnetoelastic properties of ferromagnetic thin films, and belongs to the technical fields of engineering materials, structural deformation and mechanical experiments. Background technique [0002] Ferromagnetic thin film materials are an important class of functional materials in microelectronics and information technology. They have a variety of unique physical properties, such as magnetic anisotropy, magnetostrictive effect, magneto-optic effect, magnetoresistance effect, etc. It has been widely used. With the development of high technology in human society, more and more new magnetic thin film materials and devices are required to be developed. Ferromagnetic thin films are also widely used in micro-electromechanical systems (MEMS) due to their excellent force-magnetic coupling characteristics, such as magnetic micro-drivers, various micro-sensors, and micro-magnetic valve sens...

Claims

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Application Information

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IPC IPC(8): G01N27/72
Inventor 冯雪董雪林黄克智
Owner TSINGHUA UNIV
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