Holding apparatus and holding method
A technology of holding device and carrying device, which is applied in the direction of workpiece clamping device, ion implantation plating, coating, etc., which can solve problems such as wear, scratches on the surface of small glass substrates, and influence on the dimensional accuracy and appearance quality of optical filters. , to achieve the effect of improving production efficiency, good holding effect and simple structure
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[0014] The holding device and holding method provided by the technical solution will be described in detail below in conjunction with the accompanying drawings. The holding device and the holding method of the technical proposal can be used for fixing sheet-like and plate-like workpieces to be processed, such as glass substrates after spheronization in the optical filter manufacturing process.
[0015] see figure 1 , The holding device 100 provided by the first embodiment of the technical solution includes a carrying device 10 and an air suction device 20 communicated with the carrying device.
[0016] The carrying device 10 includes a carrying portion 11 , a side wall 12 and a bottom wall 13 .
[0017] The carrying portion 11 is opposite to and parallel to the bottom wall 13 . The side wall 12 is disposed between the bearing portion 11 and the bottom wall 13 , and forms a cuboid structure together with the bearing portion 11 and the bottom wall 13 , thereby forming a cavity...
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