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Split type micro-electric mechanic system and preparation method thereof

A micro-electromechanical system, split technology, applied in the field of micro-machining, can solve the problems of the chip cannot be reused, the chip operation cost is high, and has no practicability, so as to ensure light transmittance and surface biochemical characteristics, suitable for one-time use. Useful, reliable results

Inactive Publication Date: 2012-03-28
PEKING UNIV
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  • Description
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  • Application Information

AI Technical Summary

Problems solved by technology

The chip contains multiple functions and has a complex structure, but the cost of preparation is high; and the integration of microfluidic channels on the chip makes the biological sample directly contact with the chip, so that the chip cannot be reused; as mentioned above, the above two factors make the chip The unit operating cost is too high to be practical

Method used

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  • Split type micro-electric mechanic system and preparation method thereof
  • Split type micro-electric mechanic system and preparation method thereof
  • Split type micro-electric mechanic system and preparation method thereof

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Embodiment Construction

[0019] The split micro-electromechanical system and its preparation method proposed by the present invention are described as follows with reference to the drawings and embodiments.

[0020] The embodiment of the split MEMS system of the present invention figure 1 As shown, the system includes: a microfluidic chip 1 made of polydimethylsiloxane, the thickness of which is about 2-3 mm, the microfluidic chip 1 contains a sample channel 3 to be detected and analyzed, and the channel The width 12 is 200 μm, the thickness 13 is 50 μm, and the length direction is serpentine arrangement, with a total length of 2 m; the connection between the concave channel and the microfluidic chip has two openings 4, 5 with a diameter of 1 mm; The functional substrate 2 includes: a silicon dioxide insulating layer 6 formed on the inner surface of the bottom of the functional substrate, the thickness of which is 3000 A plurality of parylene connection structures 8 and air gap structures 9 uniformly dis...

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PUM

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Abstract

The invention relates to a micromachining process, and particularly relates to a biological micro-electric mechanic system. The invention provides a split type micro-electric mechanic system and a preparation method thereof. The split type micro-electric mechanic system comprises separate polymer microfluidic chips on the structure and a functional base, wherein, the functional base has the advantages of stable structure, reliable performance and repeat application by adopting the process technology of the high-precision silicon-based micro-electric mechanic system; and the microfluidic chipshave the advantages of extremely low cost and disposable application by adopting the micro process technology of the high-flux polymer. Therefore, the micromachining process can be applied under different situations, and is particularly suitable for the design of the low-cost, rapid, multifunctional integrated and portable clinical biological micro-electric mechanic system.

Description

Technical field [0001] The present invention relates to micro-processing technology, in particular to biological micro-electromechanical systems. Background technique [0002] With the continuous development of micromachining technology, portable clinical bio-microelectromechanical systems with small size, low power consumption, no need for complex external equipment, and integration of multiple clinical functions have become the focus of current research, and they are also considered to be the next generation of clinical testing and monitoring. One of the key technologies to build a true point of care (Point of Care). In sharp contrast with the vigorous development of related laboratory research, the industrialization of bio-microelectromechanical systems has been slow or even stagnant. Among them, the cost of the final device is recognized as a key issue that needs to be resolved. [0003] Due to the needs of biochemical reactions, biological micro-electromechanical systems are ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): B01L3/00
Inventor 王玮雷银花李志宏
Owner PEKING UNIV
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