Assembly apparatus of coating head and moutning method

A coating device and assembly device technology, which is applied to the surface coating liquid device, assembly machine, spraying device, etc., can solve the problem of no specific disclosure of the operation

Inactive Publication Date: 2009-06-10
HIRATA & CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, prior art assembly devices and moving devices do not specifically disclose such operations as described above.

Method used

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  • Assembly apparatus of coating head and moutning method
  • Assembly apparatus of coating head and moutning method
  • Assembly apparatus of coating head and moutning method

Examples

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Embodiment

[0084] Preferred embodiments of the assembly device and installation method of the applicator head according to the present invention will be described in detail below with reference to the drawings. Prior to this description, first, a brief description will be given of the coating head to be assembled and the liquid coating device to which the coating head is mounted.

[0085] The liquid application device is used to apply a liquid such as a resist or a chrome coating solution to the surface of an object to be applied, such as a semiconductor substrate or a liquid crystal substrate, with a uniform thickness.

[0086] As shown in FIG. 28 , a liquid application device 101 has a base 102 and a table 103 provided at the center of the base 102 , and a substrate 104 to be coated is placed on the table 103 . Two side edges of the base 102 are respectively formed with vertical sidewalls 102a, 102b, and guide rails 105a, 105b are laid on the sidewalls 102a, 102b. Furthermore, on the ...

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PUM

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Abstract

The present invention provides an assembly device for a coating head capable of easily and quickly shifting coating parts of the coating head onto an assembly bench and capable of easily and quickly mounting the assembled coating head into a liquid coating device. The assembly device for a coating head includes a hoist (20) for hoisting the coating head, an assembling bench (70) carrying a coating head slice, and a carrying bench (54) for carrying another coating head slice; the assembling bench may rotate between a first position when carrying a coating head slice and a second position when moving the assembled coating head into the liquid coating device; when the assembling bench (70) rotates to the second position after the coating head is assembled, the coating head on the assembling bench (70) towards a direction suitable for mounting the liquid coating device, in this condition, hosting installation can be carried out with the hoist (20).

Description

technical field [0001] The present invention relates to a coating head used for assembly, maintenance or replacement of a coating head used in a slit-type liquid coating device for coating a liquid such as a coating liquid onto an object to be coated such as a semiconductor substrate or a liquid crystal substrate. An assembling device, an assembling method and an installation method, in particular relate to an assembling device and an installation method of a large coating head. Background technique [0002] Conventionally, as a device used when applying a coating liquid such as a resist to a coating object such as a semiconductor substrate or a liquid crystal substrate, especially a square coating object, there is a slot type liquid coating device (slit type coating device). machine). This type of liquid application device has the advantages of less consumption of application liquid and lower cost compared with a spin coater. [0003] In recent years, in the field of liqu...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B23P21/00B05B1/00
CPCB05C5/02B05C11/00B05C13/02
Inventor 德永英树
Owner HIRATA & CO LTD
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