Electrostatic force microscope and measurement method thereof
A measurement method and electrostatic force technology, applied in the field of electrostatic force microscope and its measurement, can solve problems such as use limitations and achieve the effect of improving spatial resolution
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[0035] The present invention will be further described below in conjunction with the accompanying drawings.
[0036] Structural schematic diagram of the present invention is attached figure 1 As shown, the present invention does not affect the original measurement function of the static atomic force microscope. Before scanning the electrostatic force image, it is necessary to scan the surface topography of the sample with an atomic force microscope. The atomic force microscope adopts a progressive scanning method to obtain topography. The atomic force microscope works in the "intermittent contact" mode of the conductive microcantilever probe 1-1 and the sample 1-4. The sample 1-4 is fixed on the piezoelectric scanner 1-5, and the piezoelectric scanner 1-5 drives the position of the sample 1-4 to change in the X, Y, Z three-dimensional space under the action of the voltage signal output by the controller 6, thereby controlling The relative position of sample 1-4 and the tip ...
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