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Electrostatic force microscope and measurement method thereof

A measurement method and electrostatic force technology, applied in the field of electrostatic force microscope and its measurement, can solve problems such as use limitations and achieve the effect of improving spatial resolution

Inactive Publication Date: 2009-07-29
SUN YAT SEN UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

The existing electrostatic force microscope only utilizes the first intrinsic vibration mode of the micro-cantilever probe, and does not utilize other higher-order vibration modes, resulting in relatively limited use

Method used

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  • Electrostatic force microscope and measurement method thereof
  • Electrostatic force microscope and measurement method thereof
  • Electrostatic force microscope and measurement method thereof

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Embodiment Construction

[0035] The present invention will be further described below in conjunction with the accompanying drawings.

[0036] Structural schematic diagram of the present invention is attached figure 1 As shown, the present invention does not affect the original measurement function of the static atomic force microscope. Before scanning the electrostatic force image, it is necessary to scan the surface topography of the sample with an atomic force microscope. The atomic force microscope adopts a progressive scanning method to obtain topography. The atomic force microscope works in the "intermittent contact" mode of the conductive microcantilever probe 1-1 and the sample 1-4. The sample 1-4 is fixed on the piezoelectric scanner 1-5, and the piezoelectric scanner 1-5 drives the position of the sample 1-4 to change in the X, Y, Z three-dimensional space under the action of the voltage signal output by the controller 6, thereby controlling The relative position of sample 1-4 and the tip ...

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Abstract

The invention provides an electrostatic microscope and a measurement method. The electrostatic microscope consists of a scan head, a low frequency voltage signal generator, a high frequency voltage signal generator, a low frequency vibration signal detector, a high frequency vibration signal detector and a controller; and the scan head comprises a probe, a probe location inductor, a piezoelectric vibration exciter and a piezoelectric scanner. Based on an existing electrostatic force microscope, a higher order eigenvibration mode of the probe is adopted to measure electrostatic force. As interaction of the probe and the sample is different in different vibration modes, the corresponding performance is different in aspects such as resolution, sensitivity, stability and the like. The electrostatic microscope can help significantly improve spatial resolution of the electrostatic force microscope in atmospheric environment.

Description

technical field [0001] The invention belongs to the field of electrostatic force microscopes, in particular to an electrostatic force microscope and a measuring method thereof. technical background [0002] Electrostatic force microscopy (EFM) is a technology based on atomic force microscopy (AFM), which can measure the electrostatic interaction force between two objects and its two-dimensional distribution. Electrostatic force microscopy has become an important means of characterizing the microstructure and properties of materials by obtaining the local distribution image of the charge or potential on the surface of the sample through the dynamic measurement of the electrostatic force. [0003] Electrostatic force microscopy requires the use of atomic force microscopy to obtain surface topography images of samples. Electrostatic force microscopy and atomic force microscopy employ microcantilever probes to measure force. In the atmospheric environment, the electrostatic fo...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N13/10
Inventor 丁喜冬张进修
Owner SUN YAT SEN UNIV
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