Electrostatic force microscope and measurement method thereof

Abstract

The invention provides an electrostatic microscope and a measurement method. The electrostatic microscope consists of a scan head, a low frequency voltage signal generator, a high frequency voltage signal generator, a low frequency vibration signal detector, a high frequency vibration signal detector and a controller; and the scan head comprises a probe, a probe location inductor, a piezoelectric vibration exciter and a piezoelectric scanner. Based on an existing electrostatic force microscope, a higher order eigenvibration mode of the probe is adopted to measure electrostatic force. As interaction of the probe and the sample is different in different vibration modes, the corresponding performance is different in aspects such as resolution, sensitivity, stability and the like. The electrostatic microscope can help significantly improve spatial resolution of the electrostatic force microscope in atmospheric environment.

Description

technical field

[0001] The invention belongs to the field of electrostatic force microscopes, in particular to an electrostatic force microscope and a measuring method thereof. technical background

[0002] Electrostatic force microscopy (EFM) is a technology based on atomic force microscopy (AFM), which can measure the electrostatic interaction force between two objects and its two-dimensional distribution. Electrostatic force microscopy has become an important means of characterizing the microstructure and properties of materials by obtaining the local distribution image of the charge or potential on the surface of the sample through the dynamic measurement of the electrostatic force.

[0003] Electrostatic force microscopy requires the use of atomic force microscopy to obtain surface topography images of samples. Electrostatic force microscopy and atomic force microscopy employ microcantilever probes to measure force. In the atmospheric environment, the electrostatic fo...

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