Sample traveling stage with flexure mechanism module to absorb the deformation of the slide

Abstract

A sample traveling stage with flexure mechanism module is provided to reduce the deformation error of a mirror including a sample table and a sample by not delivering the deformation of a slide to the sample table. In a sample traveling stage with flexure mechanism module, a moving unit mounted on a base frame(10) includes a first slide(20) moving along with a first guide block(21) and a second slide (30) which is mounted on the first slide and moves along with a second guide block(32). A moving unit transfers a sample(41) using the sample table(40) mounted on the second slide and measures a displacement through X,Y bar mirrors (42,43) which are mounted vertically with each other on the sample table. A measuring unit receives an interference signal of the beam reflected with X, Y bar mirror through a receiver and outputs a displacement signal. A flexure mechanism includes a plurality of buffering holes, a loader and the deformation lines.

Description

technical field [0001] The present invention relates to a sample delivery platform for inspection instruments or precision processing equipment for semiconductors or FPDs (Flat Panel Displays), in particular, to a sample delivery platform with a flexible mechanism to absorb the deformation of slide rails (slide), the purpose of which is to Improve measurement accuracy by preventing deformation of the slide rails of the sample transport platform. Background technique [0002] In general, a sample delivery platform is an inspection instrument or precision processing equipment for semiconductors or FPDs (Flat Panel Displays), a device for loading and delivering a measurement / processing object (hereinafter referred to as a 'platform') to a desired position; and Used in laser displacement measurement systems to analyze the displacement signal measured by the interference between the laser beam incident on the mirror and the laser beam reflected by the mirror. [0003] For exampl...

AI Technical Summary

Problems solved by technology

[0006] However, the sample stage 116 of the sample transport platform 100 is deformed due to the following reasons

First, the slide rails 113, 114 are excessively connected due to processing errors of the guide parts 111, 112 or errors in linearity and flatness.

Second, in the case of ambient temperature changes, due to the difference in coefficient of thermal expansion between the slide rails 113, 114 and the sample stage 116, the degree of deformation is different, and, in particular, when the slide rails 113, 114 and the sample stage 116 pass through for example In the case of over-connection of the connecting means of the screw, problems related to the deformation of the slide rails 113, 114 arise when the deformation of the slide rails 113, 114 is transmitted to the sample stage 116

[0015] Since precision equipment requires ultra-precision suitable for the sample delivery platform 100, materials for the above-mentioned slide rails 113, 114 and sample stage 116, such as Invar or Zeroder, are used as a unit to solve the above-mentioned problems; however, this use also has Problems where Invar or Zeroder cost at least ten times more than aluminum and where operating costs increase due to poor workability levels

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