Sub-wavelength metal polarization beam splitting grating for 1550 nanometer waveband
A polarization beam splitting, subwavelength technology, used in diffraction gratings, optics, optical components, etc.
Inactive Publication Date: 2010-06-23
CHONGQING UNIV OF ARTS & SCI
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As far as we know, no one has proposed a sub-wavelength metal polarization beam-splitting grating for the 1550 nm band
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[0019] Subwavelength metal polarization beam-splitting gratings were fabricated by nanoimprinting, reactive ion assisted etching and physical sputtering techniques. The production process proceeds in the following steps:
[0020] First, spin-coat a layer of polymethyl methacrylate (PMMA) with a thickness of 323 nm on the fused silica substrate, heat it to 200 ° C (105 ° C higher than the glass transition point of poly methyl methacrylate), and the prefabricated A silica template (with a grating pattern with a period of 150 nm, a duty ratio of 0.7, and a depth of 900 nm) was pressed into the polymethyl methacrylate at a pressure of 15 MPa. At this time, polymethyl methacrylate is higher than its glass transition point temperature of 105 ° C, similar to a viscous liquid, and can flow under pressure. Keep the pressure constant, lower the temperature to 60°C (105°C lower than the phase transition point), and keep it for about 10 minutes. Due to the hydrophilicity of polymethyl m...
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A sub-wavelength metal polarization beam splitting grating used for 1550 nanometer waveband is characterized in that the period of grating is less than 200 nanometers. The groove depth is 230 nanometers to 410 nanometers. The duty cycle of grating is 0.3. The polarization beam splitting grating only has 0-grade diffraction. The extinction ratio is larger than 20dB. The reflection diffraction rateof TE polarizing light and transmission diffraction rate of TM polarizing light are equally higher than 96%. Especially when the period of grating is 150 nanometers and the groove depth is 323 nanometers, the transmission diffraction ratio extinction ratio and reflection diffraction extinction ratio of grating respectively obtain 67dB and 23 dB, and the reflection diffraction rate of TE polarizing light and transmission diffraction rate of TM polarizing light respectively obtain 96.47% and 97.04%. The sub-wavelength metal polarization beam splitting grating of the invention is manufactured through the processes of nano-imprint, auxiliary etching of reactive ions and physical sputtering technology. The sub-wavelength metal polarization beam splitting grating of the invention also has the advantages of large-scale and low-cost production, excellent beam splitting characteristic and stable and reliable performance of manufactured grating.
Description
technical field [0001] This patent relates to a polarization beam splitting grating device in the optical fiber communication band, especially a sub-wavelength metal polarization beam splitting grating with a wavelength of 1550 nanometers. Background technique [0002] As one of the main pillars of modern communication, optical fiber communication has the advantages of large capacity, low loss, long transmission distance, and strong confidentiality. It plays a pivotal role in modern communication and is the main way of information transmission. In order to increase the bandwidth, increase the communication capacity, and reduce the crosstalk between channels, different polarization states are usually used to transmit signals. Polarization beam splitter is a key optical component in optical fiber communication. It can split light into two beams of polarized light (TM polarized light and TE polarized light) whose polarization directions are perpendicular to each other. It is us...
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IPC IPC(8): G02B5/18G02B27/28
Inventor 赵华君袁代蓉
Owner CHONGQING UNIV OF ARTS & SCI