Static electricity resistant component and method for manufacturing the same

A manufacturing method and anti-static technology, applied to electrical components, circuits, varistors, etc., can solve problems such as increased heat generation, difficulty in forming high-precision gaps, and large resistance values

Inactive Publication Date: 2009-09-30
PANASONIC CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, the surface is easily oxidized, so when the thickness of the film is less than 2 μm, the resistance value becomes extremely large, and the heat generation i...

Method used

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  • Static electricity resistant component and method for manufacturing the same
  • Static electricity resistant component and method for manufacturing the same
  • Static electricity resistant component and method for manufacturing the same

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no. 1 approach

[0046] Next, using the first embodiment, refer to the appended Figure 1 Next, the antistatic component and its manufacturing method will be described. figure 1 It is a drawing showing a sectional view of the antistatic member according to the first embodiment of the present invention. Such as figure 1As shown, the antistatic component according to the first embodiment of the present invention has a pair of first electrodes 2, and the pair of first electrodes 2 are formed on the upper surface of the alumina substrate 1, which is an insulating substrate with a relative dielectric constant of 50 or less, preferably 10 or less. The top constitutes the extraction electrode. The second electrode 3 is located between the pair of first electrodes 2 and partially overlaps with the first electrodes 2 and is electrically connected. The second electrode 3 is made of a material with a high melting point, and has a thinner film thickness than the first electrode 2 . A gap 4 provided by...

no. 2 approach

[0077] Below, while referring to the attached Figure 1 The antistatic member of the second embodiment and its manufacturing method will be described. In the antistatic member according to the second embodiment of the present invention, the second electrode 3 is formed of a material mainly composed of nickel. Except for this point, it is the same structure as the above-mentioned first embodiment of the present invention. Therefore, its cross-section is the same as figure 1 In addition, the manufacturing process diagram showing its manufacturing method is also the same as Figure 2A ~ Figure 7B same. Furthermore, its electrostatic test method is the same as that of the first embodiment by using Figure 8 method is carried out. Since they are the same, descriptions of the cross-sectional views, manufacturing process drawings, and electrostatic test methods are omitted.

[0078] In the antistatic component of the second embodiment of the present invention constituted as abo...

no. 3 approach

[0091] Next, using the third embodiment, while referring to the attached Figure 1 Next, the antistatic component and its manufacturing method will be described.

[0092]The antistatic member according to the third embodiment of the present invention comprises the second electrode 3 from a material mainly composed of aluminum. Except for this point, the rest is the same structure as the above-mentioned first embodiment of the present invention, therefore, its cross-sectional view is the same as figure 1 In addition, the manufacturing process diagram showing its manufacturing method is also the same as Figure 2A ~ Figure 7B The same, and its electrostatic test method is also the same as Figure 8 Same as explained. Therefore, descriptions of the cross-sectional views, manufacturing process drawings, and electrostatic test methods are omitted.

[0093] In the antistatic component of the third embodiment of the present invention constituted as above, the results of the stati...

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Abstract

A pair of first electrodes (2) arranged on the upper surface of an alumina substrate (1) are constituted to have a large film thickness by using a material having a small specific resistance. A second electrode (3), which is arranged between the pair of first electrodes (2) and is composed of a high melting point material, is arranged to have a small film thickness. A gap (4) is formed on the second electrode (3). Heat and damages of the first electrode (2) constituting an extraction electrode are reduced, and the gap on the second electrode (3) is highly accurately formed to have a narrow gap width. Thus, a static electricity resistant component, which has resistance characteristics against repeated application of static electricity, a low peak voltage applied to the component and stable electrostatic discharge suppressing characteristics, is provided.

Description

technical field [0001] The invention relates to an antistatic component for protecting electronic equipment from static electricity damage and a manufacturing method thereof. Background technique [0002] In recent years, along with rapid progress in miniaturization and high performance of electronic devices such as mobile phones, the miniaturization of electronic components used in electronic devices has also rapidly progressed. However, on the other hand, the withstand voltage of electronic equipment and electronic components decreases with miniaturization. As a result, there is an increase in the number of cases where circuits inside the equipment are damaged due to static electricity pulses generated when the human body comes into contact with the terminals of the electronic equipment. This is because a high voltage of hundreds to thousands of volts is applied to circuits inside the device at a rate of increase of less than 1 nanosecond due to electrostatic pulses. [...

Claims

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Application Information

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IPC IPC(8): H01C7/10H01C7/12H01T4/10
Inventor 吉冈功一绳手优克森野贵野添研治井关健
Owner PANASONIC CORP
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